HRX-OM-W002

1 1 3 3 3 3 18AWG BK 3 3 1 1 1 1 C3 (CN51) (CN1) (CN6) Compressor CM CM AC Power Board 3 1 PCB1 3 3 [ ] TH 14AWG BK 14AWG BK C CM 2 Current Transformer S 14AWG G/Y G3 [ ] [ ] 14AWG BK S Condenser Circuit Protector R C1 E CT 1 14AWG G/Y G1 [ ] CP R 1 1 [ ] R [ ] 14AWG BK 14AWG BK N (CN4) N [ ] 14AWG BK 14AWG BK 2 2 22 21 L L L [ ] [ ] 14AWG BK 14AWG BK 1 1 12 11 (CN2) WH BK 3 12 12 3 3 BR

A_HEC-OM-K001

Fig. 5-1 Details of operation panel 1st line Indicates No. corresponding to the alarm which arises and [WRN] comes to light up when temp. upper or lower limit warning occurs. E R R 1 1 W R N P V < 3 1 . 6 C # 1 2nd, 3rd line S V 3 0 . 0 C Current temp.[PV]]and target temp.[SV] during normal operation.

Large Size Vacuum Module: Series ZR

SP 18 20 ZR1 1-K1M-DZCUK For port exhaust Exhaust (EXH.) port Rc 1/4 AMJ A B AMV A B S A B AEP 75.3 HEP 7.2 1 Related Equipment A B A B S A B Digital pressure switch for vacuum 109 1 (Port exhaust) 114 1 (Built-in silencer) 109 PE A (79.8) 1 85 1 PD 60 1 PS PV 147 (2000) 957 Series ZR Ejector exhaust Vacuum V port Ejector System with Valve Pilot pressure exhaust PE port Circuit diagram Release

CV/MVGQ

L 50 100 J 1 CV3 Without auto switch 100 L 50 Y7BW J 1 CDV3 With auto switch Bore size 40 50 63 80 100 Number of auto switches 40 mm 50 mm 63 mm 80 mm 100 mm Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Vacuum Module Series ZX

(For replacement) How to order (1) Valve unit (Supply valve: Air operated) (For replacement) (3) Ejector assembly How to Order Unit for Replacement 05 1 D W ZX1 (1) Valve unit Unit for replacement Ejector exhaust K1 A V ZX1 5 Z B L D S L 1 Nozzle diameter Built-in silencer 2 Port exhaust 05 07 0.5 mm 0.7 mm Single (PD and PS ports are equipped with plugs.)

ZX

Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

ZR

ZR1 W 20 S 1 Ejector exhaust Nozzle diameter 2 Individual exhaust 1 Built-in silencer 10 13 1.0 mm 1.3 mm Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 84 kPa 53 kPa 13-3-9 9 Series ZR Ejector Unit/Standard Type (S): Max.

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

E-P HYREG ® Series VY1

2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

VCL

(mm) 2 4 3 5 7 10 1/8 (6A) V V V V 2 1/4 (8A) V V V V 1/4 (8A) V V V V 3 3/8 (10A) V V V V V 1/2 (15A) V 1/4 ( 8A) V V V V Available types of electrical entry are either G, C and T.

Model: 1000 (VQC1000), Port Size: N9 (5/16 inch), Option: R (External Pilot)

Model: VQC1000, Port Size: 5/16 inch, Option: External Pilot

EX500-GPR1A.eng

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

CYV

Dynamic moment Me3 We W L2 Review Me3. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 W We Me1 = 1/3 We(L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

E-P HYREG ® Series VY1 1

Sensitivity 0.5% F.S. 1% F .S. 1.5% F .S. 2% F .S. Repeatability 0.5% F.S. 1% F.S. 1% F.S. 2% F.S.

VDW

VVDW 2 0 4A VVDW 0 2 C 1 01 2 Series Series VX2 1 2 1 2 10 20 10 20 Thread type Rc G NPT Nil F N VXD Material C S Brass (C37) Stainless steel VXZ Series 30 OUT port size VVCW20-4A Stations VXE Symbol M5 01 Port size M5 1/8 (6A) 1 2 For 2 stations For 3 stations VXP Series 10 is available with M5 only.

VDW Series

Orifice size Voltage Orifice size mm 1 2 3 4 5 6 9 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other Symbol Series 1 2 1 2 3 2 3 4 1 1.6 1.6 2.3 3.2 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Options Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series Materials Materials 1 2 10 20 Symbol Nil A G H Plate material Seal material

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Orifice size Voltage Orifice size mm 1 2 3 4 5 6 9 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other Symbol Series 1 2 1 2 3 2 3 4 1 1.6 1.6 2.3 3.2 2 3 4 10 G Grommet Electrical entry 20 30 Manifold Options Blanking plate assembly Types 10, 20 VVCW20 3A Type 30 VVDW 0 3A 2 Series Materials Materials 1 2 10 20 Symbol Nil A G H Plate material Seal material