Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MSUA190 P402070-3A 1. Adjust the rotation angle within the prescribed ranges. (9010, 18010) (5 at end of rotation) Adjustment outside the prescribed ranges may cause malfunction of the product or failure of switches to operate. MSUA1-180 P402070-3B MSUA390 P402090-3A MSUA3-180 P402090-3B MSUA790 P402060-3A 2.

Rotary Table/Vane Style Series MSU

MSUA 190 P402070-3A CRQ2X MSQX MSUA 1-180 P402070-3B MSUA 390 P402090-3A MRQ MSUA 3-180 P402090-3B MSUA 790 P402060-3A MSUA 7-180 P402060-3B 2. Adjust the rotation time within the prescribed values using a speed controller, etc. (0.07 to 0.3 s/90) Adjustment to a speed slower than 0.3 s/90 can cause sticking and slipping or stopping of operation.

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

LEC-OM071xx

1 1 Outline 1.

LEC-OM02904

: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

Step Motor Controller

1 to !4.

JXCx-OMT0062

0 1 0 0 0 0 16 10 0 0 0 1 0 0 0 1 17 11 0 0 0 1 1 1 1 0 30 1E 0 0 0 1 1 1 1 1 31 1F 0 0 1 0 0 0 0 0 32 20 0 0 1 0 0 0 0 1 33 21 0 0 1 1 1 1 1 0 62 3E 0 0 1 1 1 1 1 1 63 3F 0 1 0 0 0 0 0 0 64 40 0 1 0 0 0 0 0 1 65 41 0 1 1 1 1 1 1 0 126 7E 0 1 1 1 1 1 1 1 127 7F 1 0 0 0 0 0 0 0 128 80 1 0 0 0 0 0 0 1 129 81 1 1 1 1 1 1 1 0 254 FE 1 1 1 1 1 1 1 1 255 FF 110 - 22.3 Installation Remote register

3 Port Solenoid Valve

1 !0 !3 o !2 t JIS symbol 2a 2a (N.C.) 3 1 2a (N.O.) 1 3 Double r w u e y q i !0 !1 r w u e y q i !0 !1 o o !2 !3 !2 !3 JIS symbol 2a 2b t t 2a SOL.b SOL.a (N.C.) 1 3 2b 2a 2b SOL.a SOL.b (N.O.) 3 1 Replacement Parts One-touch Fitting (Metric Size) Description No. Material Component Parts Port Port size Part no. No.

3 Port Solenoid Valve

0.024 0.008 0.016 V114 V114A V124 Note 1) V124A Note 1) Note 1) For both V124 and V124A, pressure from port 3 and exhaust from port 1.

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM

-fl Seies

3100-5FZ Sta. 2) NVFR3200-5FZ NARBF3000-00-P-1 wFs3000-20A-1 r\)(T636-1A (P Sallery) Sta.3-4) NVFR3100-5Fz NW5FR3-01T-041-037 See Note 1) Mixed Contiguration Maniiold: 1 LINE ITEM '1 DESCRIPIION OTY Four Station Manifold Ass'y as lollows: Sta. 1-4) NVFF4100-3FZB NW5FR4-01T-041-M Mixr sta. 1-2) 3/8 side sta. 3-4) 1/2 side See Note 3) Note 1) Indicate gallery tor all blocking discs (P EA, or

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

3100-5FZ Sta. 2) NVFR3200-5FZ NARBF3000-00-P-1 wFs3000-20A-1 r\)(T636-1A (P Sallery) Sta.3-4) NVFR3100-5Fz NW5FR3-01T-041-037 See Note 1) Mixed Contiguration Maniiold: 1 LINE ITEM '1 DESCRIPIION OTY Four Station Manifold Ass'y as lollows: Sta. 1-4) NVFF4100-3FZB NW5FR4-01T-041-M Mixr sta. 1-2) 3/8 side sta. 3-4) 1/2 side See Note 3) Note 1) Indicate gallery tor all blocking discs (P EA, or

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Phillips head screw SYJ3000-33 -2 (M1.7 7, Non-gloss nickel plated) Blank plate SYJ3000-21-1 Blank plate SYJ3000-21-1 Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) A A Blank plate SYJ3000-21-1 Manifold gasket VJ3000-14 -3 Manifold gasket VJ3000-14 -1 A A Blank plate SYJ3000-21-1 Applicable manifold base SS5YJ3

SYJ300-OMU0003

SYJ500 SYJ5000 SYJ5000 3 A B Assy CE M2.5 : 0.45N.m 19 No.SYJ300-OMU0003 Assy SYJ52(R)(-Q)) (SYJ54(R)(-Q)) SYJ500-10-3A(-Q) CE -Q M2.5-0.45N.m () 20 No.SYJ300-OMU0003 SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700

XLDV Series

Bonnet assembly/construction part number:1 Valve size 25 40 50 XLDV25-30-1 XLDV40-30-1 XLDV50-30-1 Valve size 63 80 100 160 XLDV63-30-1 XLDV80-30-1 XLDV100-30-1 XLDV160-30-1 Note1) The magnet for auto switch is not provided. When the magnet for auto switch is necessary, add -M9// at the suffix of the part number.

Air Cylinder NCM Series Stainless Steel Cylinders

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

-- NCM seies

o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78

NA-080-INFLW

NA-080-INFLW 97 Power 73 54 30 15 Alarm 2 x 6 Mounting Holes Tube O.D. 1/4 In Port Alarm 50 73 54 30 15 Tube O.D. 1/4 Out Port 4 x M4 x 4 Mounting Holes LLD2A-02-Z07-X31 4 x M4 x 4 Mounting Holes (Includes controller & connectors) 20 Indicator 96 13 30 40 50 20 73 115.5 1/4HyperFlare with flow to 3000 ml/min 1/4HyperFlare 3/8Soundpipe 2000 2000 Minimum flow 2 ml/min 35 35 Measurement Range