Step Motor Controller (Servo / 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

VZ5000

Note 1) At rated voltage Note 2) Plug-in should be ZNR 3-3-68 5 Port Solenoid Valve Base Mounted Series VZ5000 (2) Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Grommet 200(120) 240(160) C [dm3/(sbar)] Cv b Cv b Single Double Closed center Exhaust

Vacuum Module Series ZX

VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

TABLE OF CONTENTS

B A A B . . LEAD EGRESS .11 (2.8) DIA. WIRE LEAD EGRESS .11 (2.8) DIA. WIRE 1.31 (33.3) 1.31 (33.3) R.18 (4.6) TYP . R.15 (3.8) TYP . R.18 (4.6) TYP . R.15 (3.8) TYP . .66 (16.8) .66 (16.8) .15 (3.7) DIA. THRU (2) PLACES .15 (3.7) DIA. THRU (2) PLACES Mtg. HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

SMC Wireless System PROFINET compatible

2 Base byte 2 System diagnosis 3 DY#B (Unit 2) byte 3 System diagnosis 4 Reserved byte 4 DX#D (Unit 1) byte 5 EX600-WSV# (Unit 0) Base Valve output: 32 points byte 6 Reserved Remote (Wireless channel 001) byte 7 Reserved DY#B (Unit 3) byte 8 DX#D (Unit 1) byte 9 Reserved DY#B (Unit 3) byte 10 Remote (Wireless channel 002) byte 11 Reserved Remote AXA (Unit 2) (Wireless channel 001) byte 12

RSQ

6 e !0 !3 !2 !1 w o @0 !7 i !9 !

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

VZ3000

Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83 0.91

Pilot Operated

: JIS B 8471, 8472, 8473 Cv 2.

Mechanically Jointed Rodless Cylinders

6 !2 !0 !7 q y @2 @3 !8 !3 @4 r o !1 !

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L4 1.12-21 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 VV5QZ32 C (35) 34 Station (12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19 B 2 1 SMC B 21 Stations 6

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Applicable Auto Switch Model

2.5 3 6 7 6 6 6 6 6 6.5 6.5 7 9 9 B P CDlXW 3.5 3 3 CDY1S, CY1L RSDQ MDU CE1 MK, MK2 CXT 3 3 4 3.5 6 6.5 6 6 6 5.5 6 6.5 6 6 6.5 6.5 6.5 6.5 5.5 5.5 5.5 5 Note) Average value at normal temperature including hysteresis.

Refrigerated Air Dryers

Thread type and port size Applicable air dryer C D E Material Number of 1 set Male thread A side Female thread B side Female thread B side IDF-AP601 R1/2 NPT1/2 IDF4E IDU4E 38 20 26 IDF-AP603 R3/4 NPT3/4 IDF6E to 11E IDU6E to 11E 43 23 32 IDF-AP604 NPT1 Rc1 IDF22E, IDU22E 50 27 46 IDF-AP605 R1 NPT1 IDF15E1, IDU15E1 IDF-AP606 NPT1 1/2 Rc1 1/2 IDF37E, IDU37E 55 31 54 Brass 2 Male thread A side

PFxx-OMA1007

process data Valid (normal)/invalid (abnormal) 0: Invalid (abnormal) 1: Valid (normal) -83No.PF-OMA1007-B AMS Remote Bit Byte Note 7 6 5 4 3 2 1 0 0 Accumulated flow [high word] 1 Unit: 10 L 2 Accumulated flow [low word] 3 4 Instantaneous flow [high byte] Unit: L/min 5 Instantaneous flow [low byte] 6 Fluid temperature [high byte] Unit: 0.1 oC 7 Fluid temperature [low byte] 8 Pressure [high

0.55

SYJ 6 to 8 Pg9 1/4 VQZ 2 x 1/8 (External pilot port) Pilot EXH VP 2 x 13 (Mounting hole) VG EXH 243.1 250.7 PA PE VP3 159 166 150 140 105 90 IN EXH OUT 62 62 25 2 118 41 41 (EXH port) 2 x 1 / , 1 / , 2 4 1 2 1 (IN, OUT port) When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Rotary Table/

4 @2 !3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Set screw (Unused) r i y d Auto switch mounting bracket u e c Auto switch mounting screw M2.5 x 0.45 x 6 l Switch spacer (For BQ-2) e b Square nut (For BQ-2) w Cylinder q BQ-2 is a set of a, b and c shown above. BQ2-012 is a set of d and e shown above. Cylinder series Applicable bore size (mm) Auto Switch Mounting Bracket Part No.