PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Antistatic Tubing Series TA

Woolim e-BIZ Center (Room 1008), 170-5, Guro-Dong, Guro-Gu, Seoul, 152-050, South Korea TEL: 02-3219-0700 FAX: 02-3219-0702 ROMANIA SMC Romania S.r.l. Str. Frunzei, Nr. 29, Sector 2, Bucharest, Romania TEL: 01-3205111 FAX: 01-3261489 SLOVAKIA SMC Priemyseln automatizci, s.r.o Nova 3, SK-83103 Bratislava TEL: 02-4445-6725 FAX: 02-4445-6028 CHINA SMC (China) Co., Ltd. 7 Wan Yuan St.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

ZP

8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

VQ7-6/7-8

2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 153(166) 153(166) 141(154) 108.5(121.5) 141(154) 108.5(121.5) 50(63) 50(63) 5 3 38(53) 5 3 38(53) 32(42) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24

VQ7-6/7-8

1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse pressure): VQ7-8-YZ-S-SC 154

HRX-OM-Q026

1 delay timer (time delay) for reading ---(0)*8 setting menu Contact input signal 1 OFF detection timer ---(0)*8 Contact input signal 2 OFF Contact input signal 2 type ALT Contact input/output communication Contact input signal 2 delay timer (time delay) of reading ---(0)*8 Contact input signal 2 OFF detection timer ---(0)*8 Contact output signal 1 function RUN Contact output signal 1 operation

F

..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

HRX-OM-S004

capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-7 Cooling capacity(HRS100-W-20/40/46-) 8.4.4 HRS150-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 20 20 18 18 16 16 Cooling capacity [kW] 14 14 Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0

HRX-OM-R026

. 8-1 8.1 Control of Circulating Fluid, facility water Quality. 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-5 8.2.5 Inspection for winter season . 8-6 8.3 Consumables . 8-6 8.4 Stop for a Long Time . 8-7 8.4.1 Drain of the circulating fluid . 8-7 8.4.2 Drain of the facility

VQ5000

16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 Bottom ported Rc1/2 04 Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Notes Applicable valves and options Part No.

HRX-OM-T002

8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection and Cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 Inspection every 3 months . 8-4 8.2.4 Inspection every 6 months . 8-6 8.2.5 Inspection during winter season . 8-7 8.3 Consumables . 8-7 8.4 Operation Stop for an Extended Period of Time . 8-8 8.4.1

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

ITV

25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable connector, refer to single unit on page 14-8-8.

SL5200

Code Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 1 to 60 psig (0.007 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 02 06 10 Code Bonnet Standard Panel installation 3) Connections (Inletq, Outletw) No code P Connections 1/4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (

HRX-OM-Z002

FACILITY WATER . 8-1 8.2 INSPECTION AND CLEANING . 8-2 HRLE Series HRX-OM-Z002 Contents 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-3 8.2.3 3-month inspections . 8-4 8.2.4 6-month inspections . 8-5 8.2.5 Inspection during winter season . 8-6 8.3 CONSUMABLES . 8-6 8.4 OPERATION STOP FOR AN EXTENDED PERIOD OF TIME . 8-7 8.4.1 Discharge of the circulating fluid . 8-7 8.4.2 Drain of the

70pvpump

Port size on the side of main fluid Rc 3/8 G 3/8 NPT 3/8 NPTF 3/8 3/8" tubing 3/8" tubing 3/8" tubing 3/8" tubing 1/2" tubing 1/2" tubing 1/2" tubing 1/2" tubing Connection size in the side of air 03 F03 Rc 1/4 Threads G 1/4 Threads NPT 1/4 Threads PA331 (Assembled in normal environment) PAP331 (Assembled in clean room) For areas where it is not possible to manually operate the reset button