Vacuum Pad

rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

Vacuum Pad

rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

Vacuum Pad

rubber N S U F GN GS 02 03 04 06 B08 2 3 4 6 8 Blast type: Work pieces can be removed easily.

Series VS

PORT SIZE APPLICABLE ISO SIZE 02 1/4" 1 CODE A, B, PORT SIZE / LOCATION APPLICABLE ISO SIZE NOTES 03 3/8" 1, 2 02 1/4" SIDE ONLY 1 NO PORTS ON BOTTOM OF MANIFOLD 04 1/2" 1, 2, 3 03 3/8" SIDE ONLY 1, 2 06 3/4" 2, 3 10 1" 3 04 1/2" SIDE ONLY 1, 2, 3 02B 1/4" BOTTOM 2, 3 SIDE PORTS PLUGGED 03B 3/8" BOTTOM 1, 2 02S 1/4" SIDE 1 03S 3/8 SIDE 1, 2 BOTTOM PORTS PLUGGED HOW TO ORDER LATERAL PLUG-IN

P

Buffer connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 3 A14 2 10 to 16 3 20 to 32 B8 4 40, 50 4 ZP U6 B8 Y [qY type adaptor] B 3 ZP K20 [wBuffer] 3.8-63

Thermo-chiller

2 x 4 !3 w Parts List (170) No.

VCA

Rc G NPT NPTF Nil F N T Stations 02 : 10 2 stations : 10 stations D side U side 1 2 3 4 5 02 1/4 (8A) OUT port size How to Order Valves (VCA20) VC A 2 3 1 G 3 For air Orifice size Orifice size (mm) 3 5 Symbol 3 5 2 Class 2 Series Manual override 3 N.C. for manifold Valve type Nil B None Slotted locking type (tool required) Electrical entry Fluid G C T TL D DL DO Grommet Conduit Conduit terminal

Gun Type Ionizer

Blow setting Trigger setting 0 Slide Trigger linked 1 Trigger lock 2 OFF timer 3 s 3 5 s 4 7 s 5 Continuous blow Trigger linked 6 Trigger lock 7 OFF timer 3 s 8 5 s 9 7 s Pulse blow Mode setting switch Wiring AC adapter type IZG10-m01, 02 Connect the M8 connector on the power cable for AC adapter to the power connector on the main unit.

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Current input 0 1 None Sensor connector Nil PSE Input/Output specifications 0 1 2 3 4 5 NPN 2 outputs + 1-5 V output NPN 2 outputs + 4-20 mA output NPN 2 outputs + Auto-shift input PNP 2 outputs + 1-5 V output PNP 2 outputs + 4-20 mA output PNP 2 outputs + Auto-shift input IS Sensor connector (e-con connector) C ISG ZSM Unit specifications Note) At the factory, the connector is not attached

VCA

Valve type Thread type (for single unit only) Rc G NPT NPTF Nil F N T OUT(2) 1 IN(1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Orifice size Orifice size (mm) 3 4 5 7 10 Class 3 Class 2 Class 4 Symbol 3 4 5 7 10 Please consult

SL5200

Female) 1/2 inch face seal (Male) 1/2 inch tube weld Code 3) Panel mounting hole: dia. 1.56 inch (39.6 mm).

AS-FPQ/AS-FPG

1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

2-Color Display Digital Pressure Switch Series ISE70/75/75H

Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) 2 Color 1 4 3 Bracket mount Connector pin assignments 44.5 9 34 Output -43 (Color: Gray) 1 Brown DC (+) MPa 2 White OUT1 (PNP) 3 Blue DC () 4 OUT1 Black OUT1 (NPN) U P DOWN Output -65 (Color: Black) SET 90 1 Brown DC (+) 2 White NC 15.4 2 x 6.5 3 Blue DC () PRESSURE SWITCH 2 4 Black OUT1 (PNP) 18.3 Output -27 and -67 9.9 (Color: Gray)

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Bracket Stainless steel 304 -8- 2-3 Dimensions 1) SFB300-02: Rc1/4 2) SFB302-02: TSJ1/4 (Tube Swage Joint) 3) SFB305-02, SFB315-02: URJ (Union Ring Joint) Model A SFB305-02 79 SFB315-02 84 -9- 3.

Soft Start-up Valve AV2000/3000/4000/5000 1

66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 PPA 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 AL 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42

A

23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

PFxx-OMJ0005CN

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I