How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported
Series VX Solenoid Coil Assembly How to Order VX021 C 001 01 B Rated voltage (1) VX solenoid coil assembly 02 =+4 7> 01 =+4 7> Electrical option Application 03 =+4 7> Nil # 04 =+4 7> > -/& S 5 % * ,* -05 ( ! 001 # ) # ) #' ) L 5 % ) / *% 06 ! ' 002 003 Z 5 % *%+ * ,* -07 ( =+4 7> 08 (?
Male Run Tee: KPY Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) 2-Applicable tubing Applicable tubing O.D. mm Connection threads R Weight g L1 L2 M D2 6 7 8 9 12 13 19 20 21 24 40 42 43 45.5 49 50 56 56.5 59.5 62.5 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 KPY04-01 KPY04-02 KPY06-01 KPY06-02 KPY08-01 KPY08-02
Male Run Tee: KPY Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) 2-Applicable tubing Applicable tubing O.D. mm Connection threads R Weight g L1 L2 M D2 6 7 8 9 12 13 19 20 21 24 40 42 43 45.5 49 50 56 56.5 59.5 62.5 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 KPY04-01 KPY04-02 KPY06-01 KPY06-02 KPY08-01 KPY08-02
Male Run Tee: KPY Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) 2-Applicable tubing Applicable tubing O.D. mm Connection threads R Weight g L1 M L2 D2 KPY04-01 KPY04-02 KPY06-01 KPY06-02 KPY08-01 KPY08-02 KPY10-02 KPY10-03 KPY12-03 KPY12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 40 42 43 45.5 49 50 56 56.5
Male Run Tee: KPY Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) 2-Applicable tubing Applicable tubing O.D. mm Connection threads R Weight g L1 M L2 D2 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 40 42 43 45.5 49 50 56 56.5 59.5 62.5 6 7 8 9 12 13 19 20 21 24 KPY04-01 KPY04-02 KPY06-01 KPY06-02 KPY08-01 KPY08-02
R ZZM 06 06 R Multi-ejecter Common SUP port location Port and silencer location Series ZM Manifold Nil Both sides Number of stations R Right side L Left side B Both sides Right side Left side R L 01 1 station Right or left to the VAC port Right or left to the VAC port 05 5 stations Common EXH port size 10 10 stations (Max.) 04 06 1 2 3 4 Thread type S Silencer for ZZM (ZZM-SA) Nil Rc NPTF
Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !
AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE-02 AS3201FE, AS3211FE AS3301FE, AS3311FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-F Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) TMH ASD AS AS-FE AS-FE Number of needle rotations Number of needle rotations Number of needle rotations
Dimensions (mm) Electrical entry Z J E H C G A B D Model Grommet Conduit DIN terminal Conduit terminal Y N X W V U T S R Q VV2CL2 56 34.5 4.5 17.3 24.5 38 49 20 28 77 66 99 41.5 58 46 43.5 44 45.5 22 VV2CL3 66 38.5 5.5 19.3 28.5 42 57 25.5 30 86.5 68 101 51 60 48 53 45.5 55 24 VV2CL4 74 41.5 5.5 20.8 28.5 42 57 25.5 30 94 70 103 58.5 62 50 60.5 47.5 62.5 26 17-2-37
Note Symbol 1P Common Common 3R Common Individual 1 Type 41 Type 42 VHS 3 VV3PA3-42-053-02 Stations 02 2 stations ... ... 20 20 stations To order valves and blank plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.
-02 AS3201FE, AS3211FE AS3301FE, AS3311FE AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations Number of needle rotations AS4201FE, AS4211FE
Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01
Dual 3-port valve S07 A B C6 0.58 0.39 0.16 0.67 0.37 0.18 25 or less 49 2-position Single S0712 0.51 0.40 0.15 0.64 0.33 0.15 22 or less 34 Double S0722 0.51 0.40 0.15 0.64 0.33 0.15 10 or less 42 Manifold 3-pos. Bar Base 3-position closed center S0732 0.54 0.37 0.10 0.46 0.38 0.08 45 or less 42 Page 745 4-pos.
type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.
8 Manifold Block Assembly Standard 18 mm and 26 mm sizes mixed MBS8020 01 D M MBS80 0 01 D 2 With/Without tie-rod Size 2 4 Size 18 mm Size 26 mm With/Without tie-rod Cylinder port size 01 01B Side ported 1/8 Bottom ported 1/8 Nil Nil -1 Included None 1 Included None Thread type Wiring specifications D S Double wiring Single wiring Rc NPTF G Note) Nil T F Note) Conforms to ISO1179-1 Thread
M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.
Procedure 1In the [Parameter] 01 dialogue box select the ORIG tab. And the direction of the origin is changed from CCW to CW. Procedure 2In the [Parameter] 01 dialogue box press the "Download All" radio button. Procedure 3Power supply OFF ( Power supply ON) 32 - Origin offset The origin offset means the value of the origin.
mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC
6 17 1.6 48.2 34 54 44 24 2-Piping port size 4-4.5 40 50 (43.5) 42 2 1 4 3 4 Connector pin numbers 43 2-3.4 Pin name Pin No.