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22 For Positive Pressure ZSE40 01 22 For Vacuum/Compound Pressure Option Set pressure range For vacuum pressure For compound pressure None Bracket A (ZS-24-A) Nil 10.0 to 101.3kPa 100.0 to 100.0kPa Nil F A Piping specifications Bracket B (ZS-24-B) W1: Rc1/8 01: R1/8 (with M5 female threads) T1: NPT1/8 (with M5 female threads) Reverse pressure two directions B R1/8, NPT1/8 Rc1/8 M5 x 0.8

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

Cylinder

s st 10s' j 15 st" 20',' 1 3051 ~' 5~" 10.1[ 15 " 2ost L30s, R , 6 35.5 40.5 45.5 50.5 148.5 53.5 58.5 63.5 ' I52.5 57.5 162.5 67.5 7 10 40.5 45.5 50.5 55.5 65.5 1 54 59 '1 64 69 I 79 160.5 65.5.1 10.5 75.5 165.5 8 . 1 15 42 47 52 57 67 !

EXxx-OMY0006CN

Safety Mode (Channel Passivation) Safety Mode (Module Passivation/xxx)10.6 42 No.EX##-OMY0006CN Output feedback parameter SI Table 8-5 Output feedback parameter Enable Table 8-5 No. Bit (*) Bit (*) 1 0 I/O M 0 0 IN0 [0 and 4] 2 1 zone1 Z1 1 1 IN1 [1 and 5] 3 2 zone2 Z2 2 2 IN2 [2 and 6] 4 3 zone3 Z3 3 3 IN3 [3 and 7] (*) 10.9.2 LED 2 43 No.EX##-OMY0006CN 9. 9.1.

A

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Soft Start-up Valve AV2000/3000/4000/5000

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

Soft Start-up Valve AV2000/3000/4000/5000 1

3 57 52 47 127 115 98 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3

Air Suction Filter

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs.

Regulator for 2 MPa ARX 20

Regulator Options None Nil 1348112 G36 10 01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

cock 10 With auto drain With auto drain 01 11 How to Select Max.

ZSE30/ISE30

25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output PNP output 1 to 5V output 4 to 20mA output 25 65 26 28 Panel mount B Unit specification Nil M With unit switching function Fixed SI unitI (International System of Units) Note)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

AZ1000

2PW Delivery pressure Bonnet option Code Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Bonnet Standard Panel installation 4) No code P BP 01 Bonnet port (NPT 1/8 inch) 4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

NCQ8

Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2"), 250 (2-1/2") 056 (9/16") 075 (3/4") 106 (1-1/16") 150 (1-1/2") 200 (2

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum

Micro-Mist Separator with Prefilter Series AMH

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Speed Controller with

Inch Size Holder for speed controller Applicable tubing 01 03 07 09 11 13 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1002Fm TMH-01J TMH-03J TMH-07J AS2002Fm AS2052Fm TMH-07 TMH-09 AS3002Fm TMH-10 AS4002Fm TMH-13 Tubing size Applicable model Dimensions Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Lead Wire Clamp/Lead Wire Cap (Option) CNS Series Lead wire clamp LC-01 Lead wire cap LP-01 ML1C CLS Lead Wire Clamp/Lead Wire Cap (Option) (mm) CLQ 25 32 40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C LC-01 ML1C MLGP B 113.2 137.2 162.2 25 32 40 Series Mounting position RLQ ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 MLU Operating Range Minimum