ZP

S U F GN GS 20 108.5 58.5 50 20 25 36 15.5 12.5 12 30 118.5 68.5 50 163.5 88.5 75 J K ZP T F Width across flats L 2 12 3 10 99 49 16.5 20 109 59 Width across flats M 36.5 16 13 50 32 D C 12 30 119 69 50 164 89 75 Rc1/8 B01 N01 T01 A14 M14 NPT1/8 19 4 12 13 10 101.5 51.5 x 1 16.5 20 111.5 61.5 E NPTF1/8 50 40 Width across flats N F2 39 18.5 12.5 12 30 121.5 71.5 50 166.5 91.5 75 30 2.5 19

Battery-less

25 30 20 45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20

CA2

n = 4, 8, 12, 16 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 15 + 55 n = 2, 4, 6, 8 n (Same side) 2 (Different sides and same side) 120 110 100 20 90 20 + 55 n = 2, 4, 6, 8 90 + 55 (n 4) 2 n = 4, 8, 12, 16 (n 2) 2 100 + 55 (n 4) 2 n = 4, 8, 12, 16 110 + 55 (n 4) 2 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 D-A59W n (Same side) 120 110 100 15 90 1 2

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX.10 57.5[64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) 68.6[75.6] Approx. 300 20 20 20 20 Pg7 95.1[97.3] 85.3[87.5] 94.2 86.8 80.3 22 22 22 22 64.3 63 63 63 63 22 22 22 22 31.5 31.5 31.5 31.5 3.2 3.2 3.2 3.2 11.5 11.5 11.5 11.5 12 12 12 12 25.5 25.5 25.5 25.5 Refer to page 563

ZP

Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 8 Hexagon width across flats 12 Hexagon width across flats 8 H: M5 x 0.8 H: M6 x 1 Model A B D K L Y C G F F C G H: M6 x 1 H: M8 x 1 D E Model A B C K L Y E F E F ZPT40B 40 50 43 53 24.4 32.4 48 57 3 15 4.5 ZPT50B 34 38 ZPT10B 10 13 12 15 5.5 8.7 13.8 19 20 25 ZPT13B 16 18 40 44 66 70 25 56 60 16 19 16 18.5 20 21 23.5 25

C85

20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

C85

20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12

ZP

Hexagon width across flats (M6: 8, M8: 12) Hexagon width across flats 8 Hexagon width across flats 12 Hexagon width across flats 8 H: M5 x 0.8 H: M6 x 1 Model A B D K L Y C G F F C G H: M6 x 1 H: M8 x 1 D E Model A B C K L Y E F E F ZPT40B 40 50 43 53 24.4 32.4 48 57 3 15 4.5 ZPT50B 34 38 ZPT10B 10 13 12 15 5.5 8.7 13.8 19 20 25 ZPT13B 16 18 40 44 66 70 25 56 60 16 19 16 18.5 20 21 23.5 25

0.4

mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

Table of Contents

System error Brown DC(+) Internal data error 12 to 24 VDC + Black OUT Load Internal data error Blue DC() 16-2-9 10 Series ZSE30/ISE30 Dimensions 20 0.1 2-M3 x 0.5 Thread depth 4 Lead wire with connector 30 9.5 25 8 3.6 M5 x 0.8 MPa PRESSURE 20 0.1 10 SMC OUT Width across flats 12 SET 1.5 01: R 1/8 T1: NPT 1/8 A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Table of Contents

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Free Mount Cylinder Series CU

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Mechanically Jointed Rodless Cylinder Series MY1

Rod seal 8 1 DYR-4K DYR-4K DYR-8K DYR-8K DYR-8K NBR Piston seal 9 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 NBR O-ring 12 1 C9 C9 C18 C18 C18 NBR Since the seal kit does not include a grease pack, order it separately.

CG1

87 102 102 122 122 12 12 12 13 14 14 20 20 11 11 11 12 13 13 35 40 40 50 58 58 71 71 11 11 11 12 13 13 18 22 22 30 35 35 40 40 12 14 18 25 30 32 40 50 15.5 19.5 19.5 27 32 32 37 37 2 2 2 2 2 2 3 3 8 10 12 16 20 20 25 30 13 17 13 19 27 27 32 41 14 16.5 20 26 32 38 50 60 6 8 10 14 18 18 22 26 M5 Depth 7.5 M10 X 1.25 M5 Depth 8 M10 X 1.25 M14 X 1.5 M6 Depth 12 M8 Depth 16 M18 X 1.5 M10

Swivels

Port 1 Port 2 B Port 2 Port 1 PS2410303-20-20 5.31" 3.78" 2.63" 2.88" 1 5/8-12 1 5/8-12 134.8 mm 95.9 mm 66.7 mm 73.0 mm UN-2A UN-2A PS2410303-24-24 5.31" 3.78" 2.63" 2.88" 1 7/8-12 1 7/8-12 134.8 mm 95.9 mm 66.7 mm 73.0 mm UN-2A UN-2A Dia PS3210303-32-32 6.20" 4.28" 3.06" 3.35" 2 1/2-12 2 1/2-12 157.5 mm 108.6 mm 77.6 mm 85.1 mm UN-2A UN-2A Wrench Flats Male 37 Flare Female 37 Flare A Part

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

Air Cylinder

[mm] Bore size A BA BB CA CB CD (cd) CX GB H KA MM NA NB R U S 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 10 15 12 12 14 14 3.3 3.2 18 20 4.2 M4 x 0.7 4.8 22.5 5 8 45.5 53 65 77 16 15 18.3 18.3 20 20 5 6.5 23 20 5.2 M5 x 0.8 4.8 27.5 8 10 45.5 54 66 78 84 108 126 138 Bore size Z ZZ 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to

Electric Actuator

7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A 100 to 600

Dual Rod Cylinder Series CXSJ/CXS

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8