Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

IR1000/2000/3000

Description IR1000 IR3000 IR3020/3120 IR2020/2120 IR3010 IR1020 IR2000 IR2010 IR1010 Bracket Pressure gauge P36203018 P36202028 P36201023 G43-2-01 G43-4-01 G43-10-01 G43-4-01 G43-10-01 G33-4-01 G33-10-01 G43-2-01 G33-2-01 Accuracy 3% (Full span) 14-5-7 7 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 q i o !4 q o i !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

KQ2

(mm) KQ2F04 to 12 Effective area (2) (mm2) Connection thread Rc (1) Mass (g) D1 D2 L1 L2 M Model Nylon Urethane Applicable tubing KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35

VZ5000

02 G H VK Manual override (Non-locking) (Mounting hole) VZ VF VFR VP4 (Lead wire length) VZS G: 300 mm H: 600 mm 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFS VS4 2-Rc 1/4 (5(R1), 3(R2) port) VQ7 EVS (PE port) VFN L plug connector (L) VZ5140-LM plug connector (M) VZ5140-M(Lead wire length) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

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(mm) Model Flow characteristics NBR, FKM 1 cm3/min or less Port size Weight (g) External Leakage C[dm3/(sbar)] b Cv Seal material Leakage 2 3 4.5 2 0.59 1.2 2.3 0.59 1.2 0.48 0.45 0.46 0.48 0.18 0.33 0.61 0.18 VXE2110-01 VXE2120-01 VXE2130-01 VXE2110-02 VXE2120-02 VXE2220-02 VXE2320-02 VXE2130-02 VXE2230-02 VXE2330-02 VXE2240-02 VXE2340-02 VXE2250-02 VXE2350-02 VXE2260-02 VXE2360-02 VXE2220

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS23 1FE-01 AS22 1FE-02 AS23 1FE-02 AS32 1FE AS33 1FE AS42 1FE AS43 1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

0.

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (for VQZ100) This is used when changing piping location.

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Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

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P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

Modular Design with Uniform Body Style

Example) AC30C-F03DE1-16NR-D q e r w y t q Body size 20 30 40 Symbol Description w Pipe thread type Nil Rc V V V N*1 NPT V V V F*2 G V V V + 01 1/8 V 02 1/4 V V V e Port size 03 3/8 V V 04 1/2 V 06 3/4 V + Nil Without auto drain V V V a Float type auto drain C*4 N.C. (Normally closed) Drain port is closed when pressure is not applied. V V V D*5 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(R) VQZ100 (1.0W) (3) L Latching (2) 01[Rc1/8] 02[Rc1/4] 02 [Rc1/4] 03 [Rc3/8] VQZ200-SVQZ200 Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically.

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KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

Check Valve Series AK

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male