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Air temperature (C) 10 0 10 30 40 50 60 20 Correction coefficient 1.06 1.04 1.02 0.98 0.97 0.95 0.94 1.08 32 Series VQC Specific Product Precautions 1 Be sure to read before handling. Refer to pages 29 through 32 for safety instructions and common precautions.

Methyl alcohol Ethyl alcohol Butyl alcohol Isopropyl alcohol Cellosolve Hexane Cyclohexane 58 (0.4) 145 (1.0) 131 (0.9) 87 (0.6) 87 (0.6) 158 (70) 58 (0.4) 131 (0.9) 116 (0.8) 73 (0.5) 73 (0.5) 158 (80) 44 (0.3) 116 (0.8) 102 (0.7) 58 (0.4) 58 (0.4) 194 (90) 87 (0.6) 44 (0.3) 102 (0.7) 58 (0.4) 44 (0.3) 212 (100) Mineral oil ASTM No.3 Naphtha Note 1) Chemically inert means not to cause

Note 5) Please contact SMC regarding the set nuts for AR50 and AR60. 15-7-9 03 BE 30 1N AW F Option specifications Filter regulator Applicable models AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 AW30/40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide 1/4 Non-relieving Flow direction: Right Left Drain

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 one-touch fitting 800 700 600 500

40 4-19 through 52 52 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 36 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less. 162 102 + Stroke 17 + Stroke 17 2-M24 x 3 effective thead depth 33 136 + 2 (strokes) 204 Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 230 + 2 (strokes) 200 2-Rc 1 2 (port

Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

03 Individual EXH spacer VVQ4000-R-102 03 Refer to pages 476 to 480 for detailed dimensions of each option.

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

Relative humidity 100% Amount of moisture in air (g/m3) 35 29 (0.2) 44 (0.3) 58 (0.4) 73 (0.5) 87 (0.6) 102 (0.7) 80% 60% 116 (0.8) 40% 30 25 145 (1.0) Amount of condensed water CH 18.23.0=15.2 g/m3 20% 20 203 (1.4) B C D 232 (1.6) 15 10 5 G H 0 E A F 4 (20) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) 104 (40) 122 (50) 140 (60) 32 (0) 50 (10) 68 (20) 86 (30) 104 (40) 122 (50) 140 (60) 158 (70

(PA) port 11.5 16 115.1 107.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 3/8, 1/2 1(P) port 80 03 04 A B For vacuum/VPA744V-13/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 3R NC 1P 1/8 12(PA) port 11.5 16 115.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 80 3/8, 1/2 1(P) port 1568 3 Port/Air Operated Valve Manifold Common

Temperature conditions Water (Standard) Air (Standard) Oil (Standard) Vacuum (3) (V, M) Maximum Minimum 40 1 60 5(1) 40 5 40 40 5 5(2) Pilot port Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V, M in parentheses are option symbols.

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u Z L M9B CDRB2 B W 20 180 S With auto switch q r e !1 i o !

Basic parameter default Model LEHS10 LEHS20 LEHS32 LEHS40 Lead [mm] 255 / 76 235 / 56 235 / 40 235 / 40 Controller ID 1 1 1 1 IO pattern 1 1 1 1 Acceleration/ Deceleration pattern 1 1 1 1 S-motion ratio 0 0 0 0 Storoke (+) 1000.00 1000.00 1000.00 1000.00 Storoke (-) -1000.00 -1000.00 -1000.00 -1000.00 Maximum speed 70 80 100 120 Maximum acceleration / deceleration 2000 2000 2000 2000 Basic

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

36 40 58 22 20 82 65 102 11-/22-MXP16-20 28 70 119 50 42 56 70 29 30 108 75 128 11-/22-MXP16-30 104 Precision air slide table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive specifications for guide unit -X42 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure

40 40 Pressure loss [kPa] Pressure loss [kPa] Pressure loss [kPa] Supply pressure 200 kPa Supply pressure 400 kPa 30 30 30 20 20 20 10 10 10 0 0 0 0 400 800 1200 1600 2000 0 100 200 300 400 500 0 200 400 600 800 1000 Flow [L/min] Flow [L/min] Flow [L/min] IN Side Straight Piping Length and Accuracy (Reference Value) The piping on the IN side must have a straight section of piping with a