Base Mounted Metal Seal/Rubber Seal Series VQ

With and without sub-plate Nil Without sub-plate 02 With sub-plate (Port size: 1/4) Terminal block In the case of sub-plate alone VQ2000 PW 02 Dimensions 89.4 4 2-4.5 (Mounting hole) (43.8) (A port) (B port) 10.5 10.5 Manual override Indicator light VQ2101 037 45 5 121 (DC) 130.1 (AC) 22.4 (86.3) (AC) (77.1) (DC) 15.5 Clamp screw External pilot port M5 x 0.8 78.5 (AC) 72.6 (DC) 70.7 (A,

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.

Speed Controller with One-touch Fittings

Applicable series AS-10D AS-20D AS-25D AS-30D AS-40D AS-12L AS-10L AS-20L AS-25L AS-30L AS-40L AS1002F-02 AS1002F AS2002F AS2052F AS3002F AS4002F AS1002F AS2002F AS2052F AS3002F AS4002F DIN rail mounting bracket L-bracket Bracket for AS1002F-02 is not available. Prepare DIN rail by user.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 2) Refer to the General Specifications on P.41 for the specifications not shown in this table. 44 - Doc. no.

CG1

Bore size (mm) C d B1 D H1 (15) (19.6) (21.9) (31.2) (37.0) (47.3) 5 6 8 11 13 16 13 17 19 27 32 41 12.5 20 25, 32 40 50, 63 80 100 M8 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 16.5 18 26 31 39 AccessorySCG1 Bore size #11 1.6-11 Series CDG1 Auto Switch Specifications Refer to p.5.3-2 for details of the auto switch.

Applicable Auto Switch Model

(Tolerance 30%) OUT() Blue(Black) 5.3-41 2 Color Indication Style Solid State Switch/Band Mounting D-H7NW/D-H7PW/D-H7BW Applicable Actuator Series Grommet Series Bore size (mm) The suitable operating point can be indicated with a green light.

Smooth Cylinder

For the specifications of D-M9, please refer to SMC Information '02-E500. AC DC Auto switch model Lead wire (m) Load voltage Indicator Wiring (Output) Special function Type Electrical entry Pre-wired connector Applicable load 3 (L) 5 (Z) 0.5 (Nil) Perpendicular In-line 3-wire (Equiv.

JXCx-OMT0062

Refer to the electric actuators instruction manual for details. 41 - 10.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

2/3 Port Valve for Various

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 The VX series will be revised shortly.

Compact Manifold Regulator Series ARM5

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

VQ7-6/7-8

03 C10 02 03 C12 Enter only when using for a 2 position single or double.

HRX-OM-X037

of TEMP READY function .5-26 Offset (TEMP OFFSET) function .5-29 Pump operation mode .5-32 Discharge pressure alarm (AL18/AL19/AL20) .5-33 Electric conductivity and alarm setting (AL28) .5-35 5.4.8 CH2 setting screen .5-36 Temperature rise/drop alarm (AL14/AL15) setting .5-37 TEMP READY alarm (AL16) and TEMP READY function .5-38 Offset (TEMP OFFSET) function .5-40 Pump operation mode .5-41

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

ZQ-OM01301

Maintenance 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com NOTE: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 41 -

Vacuum Unit

(Ejector system) 41 A Vacuum Unit ZK2mA Series Electrical Wiring Specifications D-sub Connector Flat Ribbon Cable Connector Triangle mark indicator position Polarity Terminal Connector terminal no. Terminal number Polarity number Connector terminal no.

PFxx-OMJ0005CN

--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B

VXA21/22

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 4 The VX series will be revised shortly.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

10 50 33.5 M5 X 0.8 depth 5 02: R(PT) 1/4 T02: NPTF 1/4 Width across flats 19 Protective tube (Resists bending) Reference dimensions after thread installation 3.1-6 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

70pvpump

Option Body material Nil N Body only With silencer 1 2 ADC12 (Aluminum) SCS14 (Stainless steel) For AIR EXH: AN200-02 Port size Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Diaphragm material 02 03 1/4 (8A) 3/8 (10A) 1 PTFE (Fluoro resin) JIS Symbol Type Thread