High Vacuum L Type Valve

XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016

Title not found

MEM MEM 5/8 41/64 27/32 1 1/8 3/8 MEM 1/4 Typ. Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

MRQ

Replace moment of inertia1B around the rod (A) with 1A, a +b 2 2 1=m 12 1A =( ) b a 2 1B 1.5-3 Datae Theoretical Output bLinear Motion Part Theoretical Output Linear motion Part theoretical output table Unit: N Operating pressure (MPa) Piston area (mm 2) Operating direction Rod diameter (mm) Size 0.3 0.4 0.5 0.6 0.7 0. 15 0.2 241 322 402 482 563 121 804 OUT 161 32 12.2 675 202 270 337 405

VFS

Max. 3.5 With light/surge voltage suppressor Light With light/surge voltage suppressor (DZ) Light Applicable heavy-duty code O.D. 6 to 8 (Y: 4.7 to 7) Conduit terminal: VFS2610-T-01 02 With light/surge voltage suppressor Light ( ): Y, YZ Applicable heavy-duty code O.D. 6 to 8 3-8-40 41 Series VFS2000 Manifold Specifications Plug-in Type: With Attachment Plug Lead Wire Thread type The insert

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

asilltr

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

EXxx-OMA1018_Eng

Caution UNITED KINGDOM (44) 0845 121 5122 La puissance de sortie mise par lappareil de sans fil est infrieure la limite d'exposition aux frquences radio dInnovation, Sciences et Dveloppement conomique Canada. Utilisez lappareil de sans fil de faon minimiser les contacts humains lors du fonctionnement normal.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

RWr(n+20) RWw(n+20) RWr(n+21) RWw(n+21) IO-Link IO-Link : : Process data Process data Port 1 Port 1 RWr(n+2E) RWw(n+2E) RWr(n+2F) RWw(n+2F) RWr(n+30) RWw(n+30) RWr(n+31) RWw(n+31) IO-Link IO-Link : : Process data Process data Port 2 Port 2 RWr(n+3E) RWw(n+3E) RWr(n+3F) RWw(n+3F) Unit No.1 EX600-GILB RWr(n+40) RWw(n+40) RWr(n+41) RWw(n+41) IO-Link IO-Link : : Process data Process data Port

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

pressure MPa 5 to 60C (41 to 140F) Ambient and fluid temperature 1.0 (145 psi) Max. operating pressure MPa 0.15 (22 psi) Min. operating pressure MPa Speed adjustment range sec/90 0.1 to 1.0 Basic type + Switch unit Allowable kinetic energy J 0.12 (0.09 ftlb) 0.16 (0.12 ftlb) 390 (87.6 lbf) Allowable radial load Shaft load N 340 (76.4 lbf) Allowable thrust load Bearings Bearing Side ports

Turntable Cylinder Series MGT

54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41

Air Cylinder NCQ7 Series Compact Cylinder

, tri.gr,o*e 056 (r/6) h l:0.36 ot s 1s1"1 % l=0.36 r06 (170') % , 1 L l=0.52 150 \1%',) ls, th l=0.5 2O0 (2') h, t1 t:O.44 250121/z') h t:O.44 300 (3') 16, 1n l-0.55 400 (4') th, la l=0.65 056 (%6') 11,4a o75 (%',I 1'Aa 1 % 106 (1%a) 't% 15o 11%'l 13A 2 200 (2'1 1'la 2'Aa 25O l2%',) 1151e 213,4e 300 (3') 2 2% 400 (41 2uAe 33Aa NOTE l) Female lhread length ('l l rs shorter lor lhe above listed

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specification Note 4) Value for the low power consumption (0.5W) specification 56 Series VQ1000 VQ1000/Flat Cable Kit Stations VV5Q13J 0(D) U S Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) L2 23.5 P = 11 13.2 L1 6.2 41 35 Indicator light 1.5 1.5 (11) 19.5 (Mounting hole dimension) Manual override 2-

High Vacuum L Type Valve

XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21 25 30 36 109.5 121 130 147 13 5 33.5 31 216 251 165.5 192 186 218 8-24-7 8 Series MGT Proper Auto Switch Mounting Position (Detection at stroke end) Proper auto switch mounting position for cylinder (stroke end) Proper auto switch mounting position for table position detection Auto switch A B Auto switch

High Vacuum L Type Valve

48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121

High Vacuum L Type Valve

48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

High Vacuum L Type Valve

48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

CEx-OMQ0013

Err42 Err8 No.1ON ON ON LEDNo.10 Err9 3 P3 2 P2 Err9 Err9 ON ON ON ()5mm Err5 5mm 1 1 Err10 Err11 CPU Err12 ON 8P8 48 11-2 () 200 200 6P6 *L=1mm *200.0 1 PRG STEP P6 200 200 300mm/sec 50% 35% 49 12. 121 No. P1 No.