MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

SYA3000/5000/7000

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 SYA Pilot pressure MPa SYJA Specify the part numbers for valves and options together beneath the manifold base part number. VZA VFA SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

5 Port Air Operated Valve SYA3000/5000/7000 Series

(For 20, 41, 42 and 45 Types) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa (Refer to Best Pneumatics No. 1-1.) Specify the part numbers for valves and options together beneath the manifold base part number. SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.)

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

Cylinder with Lock

2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.

Air Cylinder

34 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 41 41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 58.5 56 61 56 56.5 55.5 57.5 55.5 65 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 20 Auto Switch Mounting Series CA2 Minimum

Process Valve Series VNA

VNA VNB SGC VNC VNH VND VCC 403 Series VNC Threaded Type/Port size: 10A, 15A, 20A, 25A Electrical entry port: G1/2 4 x N Manual override (Non-locking push type) Pilot port 12(P1) 2 x (Back side 10(P2)) 8 1 Bracket Main port 1 (Back side port 2) Port size: refer to table below Main port 1, 2 A 63 63 80 90 L 52 52 62 72 B 42 42 50 60 M 26 26 31 36 K 148 148 159.5 175.5 C 28 28 35 40 N 4.5 4.5

ZP

M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

58

Applicable bore size (mm) d H B C D 125 140 160 +0.084 0 +0.3 +0.1 0.1 0.3 Y-12A Y-14A Y-16A 8 46 27 42 25 32 64 100 M30 x 1.5 +0.084 0 +0.3 +0.1 0.1 0.3 NT-12 NT-16 125, 140 160 18 46 53.1 44 8 48 30 47 M30 x 1.5 28 36 72 105 M30 x 1.5 +0.1 0 +0.3 +0.1 0.1 0.3 21 55 63.5 53 8 55 34 46 M36 x 1.5 32 40 80 110 M36 x 1.5 Use a single knuckle joint or a double knuckle joint individually.

5 Port Solenoid Valve Series VQZ1000/2000/3000

957 Series VQZ1000/2000/3000 Dimensions: VQZ3000 VV5QZ35C Stations Port size PE port U side D side 56.1 71.5 M5 x 0.8 (X: External pilot port) (For external pilot) Grommet (G) L4 L3 (Pitch) P = 20 26 Approx. 300 (Lead wire length) 42 50.4 37 20.5 19.1 (DIN rail clamp thread) (DIN rail) 3/8 [1(P) port] (8) (35) 23 (5.5) 58.1 3 R2 P 1 5 R1 5 R1 P 1 R2 3 36.9 35.9 A A A A A (5.5) 5.5 73 (42

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

[48.5] 29.6 23 13.5 [ ] for AC L type plug connector (L) M type plug connector (M) (Lead wire length) 42 About 300 About 300 53.1 [59.6] (Lead wire length) 42 [48.5] 92.3 [94.9] 79.4 [82] 1 111.6 53.2 [54.5] 98.6 1 62.8 [ ] for AC Other dimensions are the same as the grommet type.

High Purity Chemical Valve

Refer to front matters 42 and 43 for Safety Instructions, and pages 491 and 492 for High Purity Chemical Valve Precautions. Piping Caution Caution 2. Tighten the nut to the end surface of the body. As a guide, refer to the proper tightening torques shown below. 1. Connect tubing with special tools.

Refrigerated Air Dryers

Applicable air dryer Conversion piping set Conversion bypass piping set IDF-S0186 IDF-S0183 IDF6E IDF-S0203 IDF-S0202 IDF8E IDF-S0187 IDF-S0184 IDF11E IDF-S0188 IDF-S0185 IDF15E1 * Refer to page 42 for dimensions. * Refer to pages 42 and 43 for dimensions. * Refer to page 41 for dimensions. 35 Optional Accessories IDF/IDU Series Specifications/Dimensions Model Selection Options Optional Accessories

•

El F B Ie (mm) (mm) (mm) 3 o o J I v K KA M N P W MM 5 :7 M1 6 x 1.5 17 34 30.5 M36 x l .S 3/4 C. 78.5 1 42 18 15 20 34.5 106 0160 Up to 1200 53 177 144 38 56 o 15 27 27 15 M14 x 1.5 15 M30 x 1.5 30.5 112 98 Up to 1000 47 143 115 32 17 0 125 50 7t ' 43 ':5.

Vacuum Unit

The unit for the type without the unit selection function is fixed as kPa. i Option3 (For details on the Function/Application, refer to page 42.)

ZP

48 58 11 14.5 20.5 12.8 14.2 16.6 24.5 27 31 42 48 58 11 14.5 20.5 12.8 14.2 16.6 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note) Type L is not available for 10.

Function: 2 Position Single, Body Option: Class 3, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 2 Position Double, Body Option: Class 3, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -