0.4

Do not install any back pressure check valve on the manifold station, on which the spacer is to be mounted.

Mist Separator

Do not use the product where these are present.

Micro Mist Separator

Do not use the product where these are present.

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

Precision Regulator

Marking on product Product name plate IR2120 IR2120 IR2120 IR2120-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** Product number MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. 1.0 1.0 1.0 1.0 MPa MPa MPa MPa Product code INPUT INPUT INPUT INPUT PRESS. PRESS. PRESS. PRESS. 0.01 0.01 0.01 0.01 0.8MPa 0.8MPa 0.8MPa 0.8MPa OUTPUT PRESS. OUTPUT PRESS. OUTPUT PRESS.

Precision Regulator

G43-10-01 G43-P10-N01-X30 Port size 02 : 1/4 03 : 3/8 04 : 1/2 2 : 0.010.8MPa Set pressure Thread type NIL:Rc F:G N:NPT 4. Marking on product Product name plate IR3120 IR3120 IR3120 IR3120-02 02 02 02BG BG BG BG *** *** *** ***-*** *** *** *** *** *** *** ***-*** *** *** *** Product number MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS.

CG1

Dimensions q Do not use the air cylinder as an air-hydro cylinder. This will cause an oil leak. w Install without twisting the bellows. If the cylinder is installed with its bellows twisted, it could damage the bellows. Rubber bumper Disassembly/Replacement Caution q Do not replace the bushings or the cushion seals. The bushings and the cushion seals are press-fit.

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Bracket Stainless steel 304 -8- 2-3 Dimensions 1) SFB300-02: Rc1/4 2) SFB302-02: TSJ1/4 (Tube Swage Joint) 3) SFB305-02, SFB315-02: URJ (Union Ring Joint) Model A SFB305-02 79 SFB315-02 84 -9- 3.

5

DO 4 x DR DA DL DU DU (mm) Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

VZ100/300/500

01 02 01 02 DIN terminal (D) VZ54-DVFN Applicable cable O.D.: 3.5 to 7 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor 4-6-33 34 Series VZ500 Manifold Specifications Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv Manifold 1(P), 3(R) port 2(A) port VV3Z5-20-1 VV3Z5-21-1 VV3Z5-40-2 VV3Z5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Caution Do not apply excessive torque when turning the locking type manual override.

Modular Type Filter Regulator Series AW

Applicable model AW40-06 AW40 AW30 AW20 AW10 Accessory Bracket assembly Note 1) AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 6) AR10P-270AS AR10P-260S G27-10-R1 G27-10-R1 Note 3) AW20P-270AS AR20P-260S G36-10

AKH/AKB Series

Do not operate in locations having an atmosphere of corrosive gases, chemicals, sea water, fresh water or water vapor, or where there will be contact with the same. 2. In locations which receive direct sunlight, the sunlight should be blocked . 3. Do not operate in locations where vibration or impact occurs. 4.

Booster Regulator/Air Tank

VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer G27-20-01 AN400-04 ANA1-04 G36-10-01 AN400-04 ANA1-04 KT-VBA22A-7 AN300-03 ANA1-03 G N S L G36-10-01 AN300-03

Digital Flow Switches

The switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 2. Mount switches in locations where there is no vibration greater than 98m/s2, or impact greater than 490m/s2. 3. Do not use in an area where surges are generated.

OML0002-C

Do not touch the electrode needles while energizing, or it may cause electric shock or accident. 4. Do not open the case to disassemble or reconstruct the product. It may cause electric shock, operation failure and disaster such as fire.

Vacuum Unit

(Do not cover both sides.

PF2A/PF2W

The switches do not have an explosion proof rating. Never use in the presence of an explosive gas as this may cause a serious explosion. 2. Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.