Rotary Table/

High precision type High precision type High precision type High precision type Ta = I (Nm) Basic type Basic type Basic type Basic type I: Inertial moment 1 2 3 7 10 20 30 50 70 100 200 31 41 0.56 41 Refer to page 3. 32 45 0.82 45 . : Angular acceleration Load . 33 48 1.1 48 2 = (rad/s 2) t 2 54 71 1.5 71 : Rotation angle (rad) 86 74 107 2.9 78 74 2.4 78 t: Rotation time (s) 166 137 197

Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type ) 95 95 95 95 10 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Flai type Ftat type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

ITV

Cable connector (4-wire) Right angle type Cable connector (4-wire) Straight type 52 Mounting hole 4 x 7 40 (31) F.R.L.

ISE70/75/75H

DOWN OUT1 U P SET ZS-31-A Bracket Note: Mounting screws are not included.

2/3 Port Valve

, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90 2.3 2.3 62 72 50 60 30 35 31

Series VQ Metal Seal/Rubber Seal Body Ported

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

2/3 Port Valve

1.5 0.4 340 10 1.9 34 4.5 0.61 11 250 1.0 6 1.05 19 3 8 (10A) 8 1.7 31 340 0.4 10 2.4 43 (15A) 10 2.4 43 1 2 420 Note) Refer to p.4.0-14 the glossary for detail of max. operating pressure differential and max. system pressure.

Vacuum

Flat vyilh rib 26 28 29 29 29 29 29.5 31 31 5 31.5 32 32.5 Deep type 95 95 95 95 107 IPI $enie ffi[r Bulfm Pad Diameters q2O . a25. s32 Pad Diameters a4O. sSO Ftat type Flai type Dep typeZPT4oD only Deep lypeZPT2sD only Flat typrg . Flat with rib Flat type.

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sEve rrlde 1 isolated corlra" 4Te 1 l o 4 ( 8 1 Aslnledace 4irvloul 31 sla!

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hn slencer iype d@s nol sal st rhe 1 Io t2124) N4ult'Connector kit wilh 1 5m cable Mulh-conneclor klt wlh 3 0m cable l4ulliconnector kitwiih 5 0m catr]e Botlom ported elbow Wilh03 2 One-touch fttng SeialkitwilhoulSl unit 1n212 (24) Boitom ported elbow Wilh 06 One-touch ntl ng AS. fterla@ 8 n8oul 31 s al/e mode 2 isolatd common ASrledace 4 rll4oLii 31 s ave mode 2 isolaled comfion As-lnledace

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPTF, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: IP65 Protection Compatible, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: -, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 110VAC 50/60HZ, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: IP65 Protection Compatible, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPT, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 110VAC 50/60HZ, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: IP65 Protection Compatible, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPTF, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPT, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: IP65 Protection Compatible, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPTF, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: -, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: IP65 Protection Compatible, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPT, Composite Symbol: -

Actuation Type: 2 Position Double, Sealant: Metal Seal, Function: Standard (1W), Voltage: 110VAC 50/60HZ, Light & Surge Suppressor: w/o Light w/Surge Suppressor, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPT, Composite Symbol: -