MVGQ

G RS H A RZQ Rc 1/8 P port MI W S CEP1 CE1 CE2 Rc 1/8 R port C + Stroke B + Stroke A + Stroke ML2B C J G5-S MVGQM, MVGQL Common Dimensions CV Applicable solenoid valve B C DA F G H J K L MM ML NN PW Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) MVGQ 40 124 38 M8 x 1.25 20 M8 x 1.25 27 30 106 48 122 10 110 M8 x 1.25 11 17 25 90 26 54 44 16 8 51 CC 25, 50, 75, 100, Series VZ5000

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

PFxx-OMA1007

Signal Details 1 24 V 24 VDC: INPUT 2 NC Not connected 3 0 V 0 V 4 C/Q IO-Link 5 NC Not connected Standby regulator (ARS) side M12 3-pin A-coded (Plug) Connector Pin No. Signal Details 3 0 V 0 V 4 C/Q Input 5 NC Not connected Digital input signal for Standby or Isolation mode This port is for an input signal to control Standby mode and Isolation mode.

ML2B

6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 y t r q e u w !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) 5(EA)/3(EB) 1(P) o Description No. Material Note Component Parts SJ3A60K with back pressure check valve Spool valve assembly 1 N.C. (Normally closed) Resin/H-NBR !0 y t r q e u q !2 i !1 Spool valve assembly 2 Resin/H-NBR N.O.

ML2B

6 e q #5 #4 $9 $1 $0 ^1 ^0 $7 $8 ^0 !2 #2 @4 !3 %0 %1 %2 !0 @2 ^3 @1 #3 ^6 $6 %3 @6 $5 ^2 %5 %6 @5 $4 ^0 $3 #1 ^5 %7 @8 $2 o %8 ^7 #0 %9 ML2BS %4 ^4 !

ML2B

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

VXP21/22/23

39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26 32.5 36.5 71 87 97 14 17.5 20 92 92 95 3 8 1 2 3 4 1 VXP2152 VXP2262 VXP2150 VXP2260 ( ): N.O. 17-3-50 9 Series VXP21/22/23 Pilot Operated 2 Port

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

w e r t y u i o q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.

HRX-OM-W038

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-O021

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

VQ4000

.: Uni-wire H System 1 to 16 stations Kit L Kit L BB C D F1 J1 J2 K Q R1 R2 U V G H 3 to18 stations SD S Simple specials are available with SMC Simple Special System.

Compact and Lightweight

Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions. Mounting Caution Caution ZK2 1.

Lubrication Equipment

Description Material Aluminum die cast Aluminum die cast Top cover Bottom cover q w No.

RB/RBL/RBQ

RS Q G Basic type: RBL1411, RBL1412, RBL2015, RBL2725 With cap: RBLC1411, RBLC1412 RBLC2015, RBLC2725 RS H A Other dimensions are the same as the basic type.

Compact Cylinder

4 y e q !3 o w u !1 M: Rod end male thread 32 to 63 With auto switch (Built-in magnet) !0 !2 r t !4 y i e q !3 o w u 80, 100 With auto switch (Built-in magnet) !0 q w e r t y u i !2 !4 !3 Component Parts Replacement Parts/Seal Kit No. Description Material Note Cylinder tube Piston Bore size (mm) Kit no.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

RB/RBL/RBQ

RS Q G Basic type: RBL1411, RBL1412, RBL2015, RBL2725 With cap: RBLC1411, RBLC1412 RBLC2015, RBLC2725 RS H A Other dimensions are the same as the basic type.

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.