. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1-100-MW 5/16" Polyurethane Tubing 100 ft. - Red TIUB-11-R1-50-MW 3/8" Polyurethane Tubing 50 ft. - Red TIUB-11-R1

. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1-100-MW 5/16" Polyurethane Tubing 100 ft. - Red TIUB-11-R1-50-MW 3/8" Polyurethane Tubing 50 ft. - Red TIUB-11-R1

. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1-100-MW 5/16" Polyurethane Tubing 100 ft. - Red TIUB-11-R1-50-MW 3/8" Polyurethane Tubing 50 ft. - Red TIUB-11-R1

. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1-100-MW 5/16" Polyurethane Tubing 100 ft. - Red TIUB-11-R1-50-MW 3/8" Polyurethane Tubing 50 ft. - Red TIUB-11-R1

. - Red TIUB-07-R1-50-MW 1/4" Polyurethane Tubing 50 ft. - Red TIUB-07-R1-100-MW 1/4" Polyurethane Tubing 100 ft. - Red TIUB-09-R1-50-MW 5/16" Polyurethane Tubing 50 ft. - Red TIUB-09-R1-100-MW 5/16" Polyurethane Tubing 100 ft. - Red TIUB-11-R1-50-MW 3/8" Polyurethane Tubing 50 ft. - Red TIUB-11-R1

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Clean Regulator/Fluororesin Type

SRF 1 07 11 0 S S 1 With nut Body size 1 3 5 Fitting type Pilot port thread type Made to Order (Refer to page 887 for details.)

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) Model Applicable tubing O.D. d T Uni thread 1 8" AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 7.8 8.9 11.4 13.2 15.2 8.9 11.4 13.2 15.2 17.9 13.2 15.2 17.9 13.2 15.2 17.9

Compact manifold regulator ARM5 Series

(located on both the right and left side) Before disassembly, be sure to check that no inlet or outlet pressure is applied and exhaust the internal pressure thoroughly before starting the job. 707 Regulator Single Unit Type ARM5S Series How to Order A 07 S ARM5 Single unit type 1.

EXxx-OMN0035CN

) ST(I) (07 ) ST(O) ON/OFF (07 ) ST(I) ON/OFF (07 ) ST(O) (07 ) (SI ) -52No.EX-OMN0035CN-A OFF (LED 0707) ON (LED 07) ()07 ON (LED 07) ()07 (SI ) -53No.EX-OMN0035CN-A EX600-DMPE EX600-DMNE EX600-DMPF EX600-DMNF PNP NPN PNP NPN D-sub(25 ) No.4-40 UNC (32 ) 8 () DC24 V Class22 A 2 A/ 0.5 A/ 2 A/ 4.7 k 5 mA ON /ON 17 V /3 mA (NPN 24 V ) (PNP 0 V ) OFF /OFF 5 V /1 mA (NPN

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-01 AS221F-U01-03 AS221F-U01-05 AS221F-U01-07 AS221F-U01-09 AS221F-U02-03 AS221F-U02-05 AS221F-U02-07 AS221F-U02-09 AS221F-U02-11 AS321F-U02-07 AS321F-U02-09 AS321F-U02-11 AS321F-U03-07 AS321F-U03-09 AS321F-U03-11 AS421F-U04-11 AS421F-U04-13 1 8" 5 32" 20.8 21.1 23.1 23.9 25.3 23.3 24.9 25.2 27.2 33.9 27.8 29.5 31.8 27.8 29.5 31.8 33.6 35.2 7.8 8.9 11.4 13.2 15.2 8.9

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

F

18.1 18.5 15.2 25.3 5/16 32.4 NAS221F-U02-09 19 17 8.9 23.3 14.5 1/4 5/32 18.5 17.2 32.5 NAS221F-U02-03 31.1 32 26.6 39.4 34.4 11.4 24.9 16.5 3/16 34.2 NAS221F-U02-05 32.4 17 13.2 25.2 1/4 34.5 NAS221F-U02-07 32.9 15.2 27.2 18.5 5/16 36.4 NAS221F-U02-09 33.6 19 17.9 33.9 21 3/8 3/8 23 19 43.2 NAS321F-U02-11 35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port. 611 3 Port Pilot Solenoid Valve 10-SYJ300 Type 20 Manifold: Top Ported/10-SS3YJ3-20Stations -00

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

EX600-WEN_WSV.eng

Parameter Setting Hardware Configuration (EDS file) I/O Map SWEDEN (46) 8 603 12 00 Ekhagsvgen 2931, SE-141 71 Segeltorp, Sweden (7) Set the Ethernet port Refer to the SMC website (URL https://www.smcworld.com) to obtain more detailed information about these setting above.