AS-FPQ/AS-FPG

Printed in Japan. 1st printing November, 2000 D-SMC.L.A. P-80 (D)

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

ZSE5/ISE5

I The dual output applies to NPN, -O~P7:~iP~tio~n~-'-~p~a~m~No~.-.~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

Thermo-chiller

D-G

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Note 3) PLC: Programmable Logic Controller Note 1) Lead wire length symbols: 0.5 m M9BW 1 m M Nil M9BWM 3 m L M9BWL 5 m Z M9BWZ Refer to page 889 for the applicable auto switch list.

Self-seal Fittings Series KC

(mm) Nylon Urethane Effective orifice(mm 2) Weight (g) L A D M Part No. d KCH04-99 KCH06-99 KCH08-99 KCH10-99 KCH12-99 4 6 8 10 12 5 8 11 18 24 5.6 5.6 13.1 13.1 26.1 18.0 41.5 29.5 58.3 46.1 40.6 43.1 46.7 52.6 54.9 22.6 24.1 25.2 28.6 29.4 9.8 11.8 14 17 19 16 17 18.5 21 22 4 6 8 10 12 Note) D: max. diameter 77

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

PF2A/PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

CG1

,B6 D-C7,C8 D-C73C D-C80C D-G5 D-K5 D-G5NTL D-H7W D-H7F D-H7BAL D-B59W D-H7 D-H7C D-C73C D-C80C D-G5W, K59W D-G59F D-G5BAL Bore B 16 (24) 16 (24) 17 (25) 19.5 (28.5) 24 (36) 24 (36) 32.5 (46.5) 32.5 (46.5) B 20.5 (28. 5) 20.5 (28.5) 21.5 (29.5) 24 (33) 28.5 (40.5) 28.5 (40.5) B 17.5 (25.5) 17.5 (25.5) 18.5 (26.5) 21 (30) 25.5 (37.5) 25.5 (37.5) 34 (48) 34 (48) B 18 (26) 18 (26) 19 (27) 21.5

Residual Pressure Release Valve

thread D L1 L2 Q KEC-02 KEC-03 665

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

Air cooled Thermo-con (Compact type)

-3 ASCII code ASCII code 02H 03H 06H 15H Code used STX ETX ACK NAK ASCII code 30H 31H 32H 33H 34H 35H 36H 37H 38H 39H Number used 0 1 2 3 4 5 6 7 8 9 ASCII code 2DH 20H Number used SP Space Minus ASCII code 41H 42H 43H 44H 45H 46H 47H 48H 49H 4AH Character used A B C D E F G H I J ASCII code 4BH 4CH 4DH 4EH 4FH 50H 51H 52H 53H 54H Character used K L M N O P Q R S T ASCII code 55H 56H 57H

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

A variety of electrical connection options Manifold Single valve SMC VQ110 -*L SMC VQ110 -*M JAPAN SMC VQ110 -*G JAPAN E E JAPAN P E P Plug-in unit manifold Plug lead unit manifold L type plug connector P 5 M type plug connector Grommet Series VQ100 Standard Specifications Standard Specifications Specifications Item specifications specifications 1watt 0.5 watt Type 3 port direct operated

VCB

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

SYJ300-OMU0003

-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V) 220VN SY100-82

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.