0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Digital Flow Switches

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

30

8 1/4 M M 12 8.3 1/8" 13.6 3.4 D 13.7 4.5 10-32UNF 1/8 1/4 A 9.1 12.6 5/32" L2 14.4 6 4.5 H Connection thread 14.7 10-32UNF 1/8 1/4 3/8 1/8 1/4 3/8 1/8 1/4 3/8 1/2 1/4 3/8 1/2 11.7 13.5 1/4" (NPT) 15.9 13.9 2 x Applicable tube L1 L1 18.6 M M 16.1 13.7 26.3 5/16" 19.1 D 20 A L2 16.6 16 40.8 3/8" H 21 Connection thread (with sealant) 22.7 18.5 19.6 57.2 1/2" 23.7 Reference dimensions after

CV/MVGQ

For single solenoid valve 1-1. Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs.

CV/MVGQ

For single solenoid valve 1-1. Pilot valve only VO302A-00 1 pc. 1-2. With gasket VO302S-00 1 pc. 2. For double solenoid valve 2-1. Pilot valve only VO302A-00 2 pcs. 2-2. With gasket VO302D-00 2 pcs.

One-touch Fittings

[mm] Connection thread Rc Model T (M) Weight [g] X (X) Y Nylon Urethane hole M 7 mm or less H1 H2 T Oval type Round type 4 1/8 KQ2E04-01G1 M12 x 1 14 14 24.4 10 7.7 10 13 13.3 5.6 4 3 21.2 1/4 KQ2E04-02G1 M12 x 1 17 14 29 14.6 7.7 10 13 13.3 5.6 4 3 30.9 4, 6 8 to 16 6 1/8 KQ2E06-01G1 M14 x 1 17 17 23.6 9.2 9.7 12 15 13.3 13.1 10.4 4.5 28.9 1/4 KQ2E06-02G1 M14 x 1 17 17 28.4 14 9.7 12 15

HRX-OM-R028

HRX-OM-R028 Contents Contents Chapter 1 Read before using. 1-1 1.1 Communication mode and operation method .1-2 1.2 Communication port.1-3 1.3 Key operations.1-4 1.4 Parameters .1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication .2-1 2.1.1 Precautions wiring communication. 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2 Communication

HRX-OM-S010

HRX-OM-S010 Chapter 1 Read before using Contents Chapter 1 Read before using . 1-4 1.1 Communication mode and operation method . 1-5 1.2 Communication port . 1-6 1.3 Key operations . 1-7 1.4 Parameters . 1-9 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication

HRX-OM-Q033

HRX-OM-Q033 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

EXxx-OMO0027

current filter Enum0807 0=Disable 1=Enable 80x1:06 Restart after short circuit Enum0808 0=Manual 1=Auto 0=0.1 ms 1=1 ms 2=10 ms 3=20 ms 80x1:09 Digital input filtering time Enum0800 0=1 ms 1=15 ms 2=100 ms 3=200 ms 80x1:0B Digital input extension time Enum0801 80x2:0 Slot x: Fault mode USINT Number of output channels 80x2:01 Channel 0 (Out) / Output setting during communication fault Enum0807

HRX-OM-M091

HRX-OM-M091 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-2 2.2

HRX-OM-T004

HRX-OM-T004 Contents Contents Chapter 1 Read before using . 1-1 1.1 Communication mode and operation method . 1-2 1.2 Communication port . 1-3 1.3 Key operations . 1-4 1.4 Parameters . 1-6 Chapter 2 Contact input/output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring and before communication . 2-1 2.2

PF2A/PF2W

size (Rc, NPT, G) 3/8 1/2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

Digital Flow Switches

2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

100

4 ZL3 only Supply valve/Release valve Vacuum pressure sensor Ejector q Max. suction flow rate w Standard supply pressure e Vacuum (2/V) port size/ Supply (1/P) port applicable tubing O.D. r Exhaust method 3 300 L/min (ANR)*1 M 0.35 MPa H 0.50 MPa Nil Silencer exhaust 6 600 L/min (ANR)*1 Symbol Vacuum (2/V) port Supply (1/P) port 06 Rc3/4 P Port exhaust (Rc1, G1, NPT1)*3 *1 Branch, Port exhaust

3

Wetted parts material Note 5) Non-grease Note 5) Refer to Wetted Parts Piping port size 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 705 g 840 g 1 1/4, 1 1/2 Construction on page 6 for details.

Digital Flow Switches, Series PF2A, Series PF2W

2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

E-P HYREG ® Series VY1

mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5

Series VS

02 1/4 Size 1 03 3/8 Size 1, 2 04 1/2 Size 1, 2 06 3/4 Size 2, 3 10 1 Size 3 NOTE: When ordering parts for assembly. (2) AXT502-34-"*" (use"*" for number of stations) tie rods must be ordered separately for size 1 only.