Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT
3/8 1/2 150 330 800 800 1/4 3/8 1/8 1/4 Port size Rc 3/4 Ambient and fluid temperature 5 to 60C (No freezing) Pressure gauge port size Rc 1/8 1/8 1/4 1/4 AW: 5 m, AFM: 0.3 m (Filtration efficiency 99.9%) Nominal filtration rating Downstream oil mist concentration Bowl material Max. 1.0 mg/Nm3 (Approx. 0.8 ppm) Note 2) Note 1) Conditions: Upstream pressure 0.7 MPa, set pressure 0.5 MPa.
4 !5 !6 !7 !8 !
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
7 Helical insert thread depth 6 Helical insert thread depth 9 Helical insert thread depth 12 CXWM16, CXWL16, CXWM25, CXWL25 F P CXWM10, CXWL10 4-J Herical insert thread depth K F P 4-M4 x 0.7 Helical insert thread depth 6 CXWM16 CXWL16 F 25 35 32.5 37.5 42.5 55 67.5 80 F 34.5 47 53 53 65.5 78 90.5 103 P 25 30 60 75 90 90 90 90 P 52 52 65 90 90 90 90 90 I I CXWM10 CXWL10 Stroke 25 mm 50 mm
Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"
[F 0] Connection product, flow range, display unit, enable/disable IO-Link Page 22 Item Default setting Connected product PFW Connected sensor Flow Connected sensor range 4 L range Display units L/min, L Enable/disable IO-Link IO-Link enabled [F 1] Setting of OUT1 Page 34 Item Explanation Default setting Either hysteresis mode, window comparator mode, accumulated output, accumulated pulse
rc 1o Indcale thewnnO spec l.ar ons n the specilicalion sheet Note 4) F.r exlenal pr ol oplDn, F ndca|elhe qter.a p otsp6licaton R fordre appricabre var@s as @11 Note 5) The o!
(R) VQZ100 (1.0W) (3) L Latching (2) 01[Rc1/8] 02[Rc1/4] 02 [Rc1/4] 03 [Rc3/8] VQZ200-SVQZ200 Note 1) Option Note 2) When specifying more than one option, please indicate them alphabetically.
counter bore B T T 4-J x E 0 -0.1 L Cylinder tube outer circumference: TC Hard chrome plated + special treatment WP X F GW GP 4-LD D QW PW 2 x 4-MM thread depth M W K G G Q + Stroke Z + Stroke (mm) Model B C CB D F G GP GW H HA HC HP HB HT K J x E A 10.5 181. 16.6 181. 5 33 31.5 32 30 171. 31 171. 2 4.2 171. 14 M5 x 0.8 x 7 12-CY3R15 19.5 19.5 21.6 191. 6 39 37.5 39 36 211. 38 241. 3 5.2
Refer to the table below for accessory/option combinations Thread Rc (PT) Table: Accessory/Option combinations Depending on model l Not available Available F G (PF) N NPT Accessories Options C C D -J -R D J T AMD150 R AMD250 AMD350 AMD450 Applicable models Accessories /Options Port size AMD550 AMD650 AMD850 01 B B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R
+ 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF
Bore (mm) H I OA OB E F M N K L Q RA RB T Inch Inch Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 25 29 36 40 5 5 5.5 5.5 #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 15.5 20 25.5 28 3.5 3.5 5.4 5.4 32 38 47 52 #8-32UNC #8-32UNC #10-32UNF 1/4-28 UNF 3.5 3.5 4.5 5 5.2 6.2 8.2 10.2 12 16 20 25 6.5 6.5 9 9 12.5 12.5 14 16 7 7 10 10 4 4 7 7 0.5 0.5 1 1 For the following
---t;F=f=='Tjt IN Bracket (Option) N ...'---Ht-t---t-+-H I--i IN o I w c.
(3), and (4) are connector pin numbers. , , and are the series PFA3 terminal numbers. 24 2-Port size 4-4.5 40 50 Connector pin numbers 2 1 (43.5) 42 4 3 Pin description Pin no.
Drarn guide 1/4 AF30 to 60 Flow direclion: Right to tefl AF10 to 60 Drain cock wiih barb fitting: 06 x 04 nylon tube AF30 to 60 Nole 1)Without a valve Display unils for product name piEle and cauion plate lor bowl :PSl,'F AF10 to 60 lypes M5 and NPT Port size syn P9d ro stze 20 30 40 50 GO l\r5 a '|8 a 1t4 a a a 3t8 a a a 3/4 a a '1 a a Float lype auto drain (N.O.)
DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.
Port size Thread type Symbol Bore Size Nil N F Rc NPT G 1 5 10 20 30 3 50 60 75 100 01 1/8 02 1/4 04 1/2 03 3/8 Standard Specifications/Single Style (Standard Dew Point 20C [4F]) Standard dew point 20C (4F) Model IDG1 IDG5 IDG10 IDG20 IDG30 IDG50 IDG60 IDG75 IDG100 IDG3 IDG1 Fluid Compressed air Range of operating conditions Standard performance conditions Standard performance Inlet air