Combination Cylinder

221 223 267 GQ 4 7 7 8 GR 4 7 7 7 H 41 45 45 50 H1 5 6 6 8 I 28 33.5 37.5 46.5 K 5 5.5 5.5 7 L 30 30 30 39 MM M8 N 15 15 15 21.5 NA 24 30 34.5 42.5 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 PG 22 27 27 29 PH 19.5 24 24 24 PL 20 24 24 24 PW 38 41 41 41 RR 9 9 9 11 S 127 137 139 167 U 14 14 14 18 Z 198 212 214 256 MGZ 1/8 1/8 1/8 1/4 M10 X 1.25 CY M10 X 1.25 M14 X 1.5 MY Clevis pin and snap

CL

83.5 90.5 GK 3.5 4 4 4 GL 6 9 9 11 F 13 13 13 16 CZ 19 19 19 30 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 MY1 100.5 P Bore 20 25 32 40 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 H 41 45 45 50 PG 22 27 27 29 I 28 33.5 37.5 46.5 GQ 4 7 7 8 PH 19.5 24 24 24 N 15 15 15 21.5 GR 4 7 7 7 PL 20 24 24 24 NA 24 30 34.5 42.5 H1 5 6 6 8 PW 38 41 41 41 K 5 5.5 5.5 7 RR 9 9 9 11 L 30 30 30 39 S 127 137 139 167 U

Table of Contents

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Fluoropolymer Piping Equipment

39 16 15 LQ1R5D-M1/2" 9 LQ1R5G-M3/4" 1/4" 27.5 33.5 6 6 LQ1R5H-M3/4" 3/8" 29 35 10 10 LQ1R6A-M 1" 3/4" 36 38 6 24 9 18 21 43 28 10 7 29 14 28 26 54 39 10 10 LQ1R52-M 12 9.4 LQ1R53-M 19 3/4" 30 39 16 15 LQ1R54-M 12 9.4 LQ1R58-M 19 1/4" 27.5 33.5 6 6 LQ1R59-M 19 3/8" 29 35 10 10 LQ1R61-M 25 3/4" 36 38 16 16 LQ1R6B-M3/4" 15 LQ1R6C-M 1" 1" 35 22.5 21.2 LQ1R6D-M3/4" 15 7 29 14 28 26 54 39 8 39.5

Cylinder with Lock

+ 30 (n 4) 2 (n = 4, 8, 12, 16) 95 + 30 (n 4) 2 (n = 4, 8, 12, 16) 110 + 30 (n 4) 2 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) 10 + 30 n (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 (Different surfaces, Same surface), 1 D-A5/A6 D-F5/J5 D-F5W/J59W D-F5BAL/F59F 100 110 120 90 15 (n 2) 2 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) 120

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4) 2 (n = 4, 8, 12, 16) Note 2) 95 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 75 90 100 110 D-A9l n (n = 2, 4, 6, 8) Note 1) 15 + 40 (n 2) 2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 40 (n 4) 2 (n = 4, 8,

AC Servo Motor Driver

Refer to section 15.1.2 15 2 15.

CNA

31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M18

CNA

30 27 60 22 96 1/8 1/8 44 10 16 32 10 85 15 52 16 12 12 10 8 Up to 500 0.1 0.3 18 35 32 70 27 108 1/4 1/8 52 12 20 40 10 95 17 56.5 20 13 15 12 11 Up to 600 200.1 0.3 25 35 32 86 27 115 1/4 1/4 64 16 20 40 10 102 17 67 20 18 12 15 11 Up to 600 0.1 0.3 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 Up to 750 Data 0.1 0.3 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14

Air Cylinder

) 1 65 70 75 10 60 D-M930 (n 4) 65 + 30 (n 4) 70 + 30 (n 4) 75 + 30 (n 4) 10 + 30 2 2 2 2 2 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 D-A515 90 (n 2) 90 + 55 (n 4) 100 + 55 (n 4) 110 + 55 (n 4) 120 + 55 (n 4) 15 + 55 2 2

LX

) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1

CNA

50 63 80 100 30 27 60 22 96 1/8 1/8 44 16 32 10 85 15 52 16 12 12 10 8 M8 X 1.25 6 14 to 500 35 32 70 27 108 1/4 1/8 52 20 40 10 95 17 56.5 20 13 15 12 11 M8 X 1.25 7 18 to 600 MGG 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 X 1.25 7 18 to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 X 1.75 11 22 to 750 MGC 40 37 116 41 160 1/4 1/4 92 30 52 14

CV/MVGQ

30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Fluid: air/inert gas, Operating pressure range: 0.1MPa - 0.7MPa (high pressure style 0.8MPa), Effective area mm 2 (Cv): metal seal 3.6 (0.2); rubber seal 5.4 (0.3), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, H 1.5W: 2 position metal seal 12 or less; 2 position rubber seal 15 or less 3 position metal seal 20 or less; 3 position rubber seal 25 or less

Brake mechanism added

+ 40 (n 4) 2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 55 60 65 D-A9V (n 2) 2 10 50 50 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8,

21

20 25 32 40 6.8 15 30 30 37 3.2 18.4 59 139 9 15 40 40 50 4 28 75 161 9 15 40 40 50 4 28 75 174 Use a thin wrench when tightening the piston rod.

7

100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.