Air Slide Table Series MXW

Refer to the Specific Product Precautions. 8H9 + 0.036 0 depth 9 Operating port Rc 1/8 (NPT 1/8, G 1/8) 9 8 x M6 x 1 thread depth 18.5 Note) A Operating direction 8H9 + 0.036 0 depth 9 (Insert) (Hexagon socket head taper thread plug) 98.6 126 55 8 50 37 Y 50 Y 50 10 43 209 Operating port Rc 1/8 (NPT 1/8, G 1/8) B Operating direction Operating direction (Hexagon socket head taper thread plug

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Pilot Operated

/N.O. 1/8 to 1/2 N.C.

REC

22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 150 to 1000 M14 X 1.5 40 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 200 to 1000 ZZ NN P RR S U Z Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 9 146 14 217 226 150 to 700 M26 X 1.5 25 9 146 14 221 230 150 to 700 M26 X 1.5 32 9 159 14 234 243 150 to 1000 M32 X 2 40 11 181 18 270 281 200 to 1000 REC D/Double clevis 2-Rc(PT

MGC

86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162 25 58 14 26 M8 X 1.25 Rc(PT)1/4 MY1 Without rear plate Bracket mounting stroke Long stroke Bracket mounting stroke stroke range (mm) Bore (mm) Bore (mm) Bore

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Mitsubishi Electric Corporation Yaskawa Electric Corporation G 1 N.C. (B contact) 2 pcs.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

9 6 6 LH 5.5 5.5 LT 14 14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

Vacuum Module Series ZX

How to Order W 1 05 ZX1 PV, V port size Nozzle diameter Nil 05 07 10 0.5 mm 0.7 mm 1.0 mm M5 x 0.8 M6 x 1 (Option) Y Ejector exhaust method 1 2 Silencer Individual exhaust Rc 1 8 Dimensions: ZX1-W 1 2 48.2 JIS Symbol Port exhaust 47 EXH port (EXH.)

CV/MVGQ

18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 10 45 30 14 9 22 13 5.5 9 19.5 17 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 10 45 30 14 9 22 13 5.5 9 19.5 17 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 14 15 50 39 18 10 24 16 7 11 22 8 76 46.5 M14 x 1.5 21.5 42.5 M32 x 2 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520.

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

Digital Flow Switches Series PF2A

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

MGC

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Note Clear hard anodized Clear hard anodized Chromated No.

PF2A/PF2W

2 46 M6 x 1 9 0 V 75 220 55 114 89 75 56 M6 x 1 9 50 msec Analog output 1 to 5 VDC PF2A7H--68 69(-M) 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured

HRX-OM-X037

. 8-10 8.4.1 Replacing Particle Filters . 8-10 8.4.2 Replacing the DI filter . 8-10 8.4.3 Consumables . 8-13 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRL100/200/300-A-40 . 9-1 9.1.2 HRL100/200-W-40 . 9-3 9.1.3 Refrigerant with GWP reference. 9-5 9.1.4 Communication specifications . 9-5 9.2 Dimensions . 9-6 9.2.1 HRL100-A-40 . 9-6 9.2.2 HRL200-A-40 . 9-7 9.2.3 HRL300-A-40

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

3r#0q u @9#2 e y!6#1@8t!2w#3!5 !7 !8 @1 @6 14A !9 @0 CJ1 CJP @7 i o CJ2 80, 100 CM2 C85 !0 !1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Air Slide Table Series MXP

9 !8 !2 !1 t e y !7 !6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

HRX-OM-Z002

winter season . 8-6 8.3 CONSUMABLES . 8-6 8.4 OPERATION STOP FOR AN EXTENDED PERIOD OF TIME . 8-7 8.4.1 Discharge of the circulating fluid . 8-7 8.4.2 Drain of the facility water . 8-8 Chapter 9 Documents . 9-1 9.1 SPECIFICATIONS. 9-1 9.1.1 HRLE050-A-20. 9-1 9.1.2 HRLE090-A-20. 9-2 9.1.3 HRLE050-W-20. 9-3 9.1.4 HRLE090-W-20. 9-4 9.1.5 HRLE090-A-40. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT