MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

SMC Basic Pneumatics

.8 4 1 o / .

PSE530/200

2 3 4 PRESSURE SET 3 16-3-1 2 A single controller monitors up to 4 pressure sensors. 1 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 ZSE ISE Multi-channel Controller Series PSE200 Pressure Sensor Series PSE530 PSE Z I SE3 Multifunction 3 Space saving 1 PS Display calibration (P. 16-3-17) Each channel has an adjustable display function.

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.8 4 1 o / .

Electromagnetic Digital Flow Switch

1*2 gal/min 6*1*2 V V gal/min 7*1*2 V gal/min Port size Symbol Port size Applicable model LFE1 LFE2 LFE3 3 3/8 V 4 1/2 V 6 3/4 V 8 1 V *1 Options 4, 5, 6, and 7, which are not in SI units, are not for use in Japan due to the New Measurement Law. *2 Options 4, 5, 6, and 7 cannot be selected when the output specification is J or K.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

4) Connector (Option) 1 CH 2 3 4 r Pin no.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

1 !2 !3 !4 !7 !

V

8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc(PT)* N NPT F G(PF)* * Remove N when ordering

Air Cylinder CP Series Cylinder Positioner Assembly

14) (401 402 (1021 1.07 (73) 0.98 t25l 205 (52) t.55 (14) 0.83 121\ 1 4 3 t 1 1 ) M22x1 5 1.46 (37) 457 ( 1 1 6 1 1.73t 6 3 i16t 0.53 113.5) 2 5 6 t65l 8 0 3 1204\ 2.80 (71) 9.72 1247\ 2 5 6 t65l 0.49 '12.5\ 3 . 1 5 l80J 10.08 (256) l40l 457 a 1 t 6 ) 3.62 192) 0.98 /30) 2.05 (52) 0.55 (14) 0.83 t21) Ml2x1 75 1 4 3 ( 1 1 ) M26x1.5 1 5 7 (40) 4 9 6 (126) 1.69 i43l t.67 (1?

Digital Flow Switch Series PFA For Air Series PFW For Water

Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time

CLQ

(Rail Mount) 157 245 403 629 982 1559 2514 3927 M5 x 0.8 Rc 1/8 Rc 1/4 Bore size (mm) Bracket no.

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.

LV50-OMQ0002

This can be prevented by inserting a noise filter such as a line noise filter and a ferrite element between the switch-mode power supply and the pressure switch, or by using a linear power supply instead of a switch-mode power supply. 3 1 DC polar indication 4 2 2 OUT2 3 DC (-) 1 Connector on the body Connector pin numbers 4 OUT1 3 1 DC (): Brown 4 2 2 OUT2: White 3 DC (): Blue 1 4 OUT1:

CLQ

40 Rod end nut 28.5 9-10-19 19 Series CLQ Dimensions: 50 Both ends tapped style: CLQA50 16 3.2 16 3.2 2 x 4-M6 x 1 Basic style (Through-hole): CLQB50 LOCK Extension locking 10.5 13 Rc 1/4 Rod side cylinder port Rc 1/4 Head side cylinder port 47 41 M10 x 1.5 thread effective depth 15 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Examine Mey. (30 + 10.5) Mey = 1/3 x 3.36 x 9.8 x = 0.44 1000 Allowable moment coefficient : Graph (2) Max. allowable moment Mmax: Table (4) We = 33.6 A1 = 10.5 Meay = 1.19 (Same as Meap) 3 = 0.44/1.19 = 0.37 Find the load factor 3 of the dynamic moment. 3 = Me/Mea 3-4 Sum of the Load Factors Can be used based on 1 + 2 + 3 + 3 = 0.17 + 0.013 + 0.24 + 0.37 = 0.79 < 1 1 + 2 + 3 < 1 Use is

Speed Controller with Uni One-touch Fitting AS Series

1 4 1 4" 18.5 39.4 34.4 32.0 26.6 5 16" 3 8" 19 1 4" 1 4 45.9 40.9 38.1 33.1 23.0 19 20.3 5 16" 3 8" 1 4" 5 16" 19.4 45.0 40.0 37.6 32.6 19 3 8 23.0 3 8" 3 8" 1 2 18.6 24 22.4 54.6 47.1 44.5 37.0 1 2" Note 1) Reference dimensions Note 2) Reference dimensions of Uni thread after installation.

Transfer

Special resin Stainless steel Special resin Stainless steel Special resin NBR NBR NBR NBR Special resin Stainless steel Carbon tool steel Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 1 1 2 2 2 2 2 2 4 2 6 4 8 2 2 6 2 1 2 4 4 4 3 4 4 1 1 2 2 4 1 4 2 1 1 1 1 1 2 2 1 1 Description Cylinder tube Head cover WR Head cover WL Piston yoke Piston End cover Wear ring Cushion ring Cushion needle Stopper Belt separator

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.