-fl Seies

or less 0.95 (0.43) % 2.0 Pressure ceDter NVFR3500 NVFR3510 1 8 0 50 or less 0.95 (0.43) .14 2.3 3 position f$:Jlili8;j:t"O "* "ithout subplale.

39

6Hexagon socket head cap screw wStopper bolt @1Seal washer rBumper @2Bumper stopper 50 CKZ3N-S050W Note 1) 63 CKZ3N-S063W Note 1) Table 1 50 CKZ3N-B050 Note 2) Opening angle Code J H G F E D C B A Stopper bolt kits 15 30 45 60 75 90 105 120 135 63 CKZ3N-B063 Note 2) tRubber cover !7Spacer !8Short head cap screw 50 CKZ2N-T050 63 CKZ2N-T063 Top cover kits 50 yMetal cover !

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.

CLA

ZZ StrO ke ~ 131 71 339 65 12.5 80 ~ 148 72 358 65 14.0 81 367 P PG PH PL PW S W X V oLD LH LS LT LX LV r 40 7/16 20 27 50 30 63 % 16 31 80 37 81 51 244 43 11.2 59 F 90 58 266 52 11.2 66 ~ 'f, 106 58 290 52 11 .2 66 'I, 42 11 20 45 153 8 27 13 9 40 207 3.2 42 70 'I, 46 10 21 50 168 0 27 13 9 45 222 3.2 50 80 'I, 48.5 13 23 60 182 0 34 16 11.5 50 250 3.2 59 93 \I, 55 15 23 70 208 0 44 16

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71 43 19 14 190 230 15 M14x1.5,15 13 0125 Up to 1000 50 47 143 145 17 15 27 171 27 . t3 128 20 212 112 255 '15 'UpJo.1 QOO 50 47 157 1060 32 19 15 43 M14n.. ?

Type: Block and Plate for Connection, Type: Air Supply / Exhaust End Block Assembly (Tie-Rod Base) SV2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: Direct mounting, Port pipe connection port diameter: Plug, Rated Voltage: -, Specification: Internal Pilot Specifications, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Block and Plate for Connection, Type: Air Supply / Exhaust End Block Assembly (Tie-Rod Base) SV2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: Direct mounting, Port pipe connection port diameter: ø10 single-action pipe fitting, Rated Voltage: -, Specification: Internal Pilot Specifications, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction

Type: Block and Plate for Connection, Type: Air Supply / Exhaust End Block Assembly (Tie-Rod Base) SV2000, Number of Inputs/Outputs: -, Connector: -, Mounting Method: Direct mounting, Port pipe connection port diameter: ø3/8" single-action pipe fitting, Rated Voltage: -, Specification: Internal Pilot Specifications, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction

Type: Module, Type: Relay Output Module (SV2000), Number of Inputs/Outputs: 1 point (output), Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: 24 DC, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

Type: Module, Type: Relay Output Module (SV2000), Number of Inputs/Outputs: 2 points (output), Connector: -, Mounting Method: -, Port pipe connection port diameter: -, Rated Voltage: 24 DC, Specification: -, Thread standard: -, Dimension: -, Applicable valve: -, Pressure reduction port: -, Option: -

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Valve model Pilot valve model Note) VQZ115-L VQ110-M Note) For the special voltages, please consult with SMC. VQZ115-M VQ110-L 4-14-41

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ2000-SVQZ2000 (1) (1) VQZ3000-SVQZ3000 (2) (2) (2) Coil voltage (2) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 Note 1) L, LO, M and MO types are attached with light and surge voltage suppressors as standard. Note 2) DIN style is applicable to VQZ2000, 3000.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others Valve style Pilot valve style 2 3 VQZ115l-lLl VQ110l-lMl 4 VQZ115l-lMl VQ110l-lLl 5 6 9 Consult SMC when requiring grommet, AC specification and others. 2.10-39

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

Vacuum Unit

100 100 100 Vacuum pressure [kPa] 80 90 90 60 80 80 40 Suction flow (High-noise reduction silencer exhaust) Vacuum pressure 70 70 Port exhaust 20 Silencer exhaust/Complex exhaust Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 Suction flow (Port exhaust) 60 60 Suction flow [L/min (ANR)] 50 50 Flow Rate Characteristics Suction flow (Silencer exhaust/ Complex exhaust) Suction flow (Silencer exhaust

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.

2/3 Port Valve

(Energized closed) Voltage 1 2 3 4 5 6 7 8 9 100V AC 50/60Hz 200V AC 50/60Hz 110V AC 50/60Hz 220V AC 50/60Hz 24V DC 12V DC 240V AC 50/60Hz 48V AC 50/60Hz Other (Contact SMC seprately) Options Standard F, G, L, T are available option. Refer to p.4.0-11 "Applicable Fluid Check List".

XL

XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

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ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!