Vacuum Module Series ZX

Rc G Note) Station 8 only 8 (Ordering example) If installed on station 1 and station 3: ZZX106-R 1 pc. ZX1101-K15LZ-EL(-Q) 6 pcs. ZX1-R1-1 ZX1-R1-3 ZX1-R16 (Dummy spacer) 4 pcs. NPTF When spacers are mounted alternately, specify them together. When retrofitting, 3 pcs. of M2.5 x 32 (for ZX) are necessary.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Note 3)The actual mounting position should be adjusted after confirming the auto switch performance. 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 3 3 1 3 3 1 3.5 3.5 2.5 0.5 3.5 3.5 2.5 0.5 1 3 1 5 5 3 5 5 3 5.5 5 4.5 2.5 5.5 5 4.5 2.5 1 7 7 5 1 7 7 5 7.5 7 6.5 4.5 7.5 7 6.5 4.5 MHS-16D MHS-20D MHS-25D MHSL3-16D MHSL3-20D MHSL3-25D MHS-32D MHS-

Process Valve Series VNA

(Back side port 2) Bracket (Option mark: B) U: Long hole for mounting 4 positions Main port 3 (3 port valve only) Flow indicator for 2 port valve VNA Dimensions (mm) VNB Model Main port 1, 2, 3 2 Port Pilot port 12(P1), 10(P2) 3 Port A B Note) C D E F G H I SGC 3 8 1 2 3 x 3 4 3 x 1 3 8 1 2 2 x 3 4 2 x 1 1 8 3 x 3 x VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A 2 x 2 x A B A B A B A B 60 80 100

XL

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

Mini Free Mount Cylinder

1 1 1 3 7 3 7 Note 1) Solid state switch D-M9/M9W: with 1 pc.

Filter Regulator

8, 1/4 1/8 40 87.6 71.8 21 M281 40 21 5 f37.5 57.5 f37.5 58.5 f37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M381.5 55 26.5 3.5 f37.5 63 f37.5 64 f37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M421.5 80 35.5 0 f42.5 73 f42.5 73 f42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M421.5 80 35.5 0 42.5 73 42.5 73 42.5 73 AW60-D 3/4, 1 1/8 95 234.1 155 45 38.4 M621.5 30 45 0 42.5

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

LJ1H

3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40

39

1 u !5 !6 !3 !4 o i Without switch !2 @1 @2 w r Description Replaceable kits list Component parts No.

Guide Cylinder Series MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

RQ

For detailed specifications, refer to page 7-9-1.

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

XM, XY

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

LG1H

depth 8 35 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 18 A 4 A 4 A 4 A 4 39.3 63.3 79.8 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable tube O.D.: 8 10 12 2n2-Rc 1/4, 3/8 [4 (A), 2 (B) port] 2-One-touch fitting

VFR

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.