Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

C D Q R S T U V W Y Z F J K AA BB H J M N 10-/21-AR20-B 10-/21-AR25-B 10-/21-AR30-B 10-/21-AR40-B 10-/21-AR40-06-B 10-/21-AR50-B 10-/21-AR60-B 2 Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 Stainless steel 304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

Rotary Actuator/Vane Type

1 i o !

AC Servo Motor Driver (SSCNET /H Type)

temperature of servo motor 1 SD (Note 1) (Note 1) (Note 1) 46.2 Abnormal temperature of servo motor 2 SD (Note 1) (Note 1) (Note 1) 46 Servo motor overheat 46.3 Thermistor disconnected SD (Note 1) (Note 1) (Note 1) (Note 1) 46.5 Abnormal temperature of servo motor 3 DB (Note 1) (Note 1) (Note 1) 46.6 Abnormal temperature of servo motor 4 DB (Note 1) (Note 1) (Note 1) 47 Cooling fan error

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 71.5 31 6.5 12.5 28 14 12.8 M4 22 45.5 44 43.5 58 41 46.5 99 43.5 66 1/8 VCW22 18 36 74.5 31 8.5 12.5 28 18 12.8 M4 22 46.5 44 44.5 58 42 46.5 99 44.5 66 1/4 22 40 88 36.5 11 15 32 20 19 M5 24 57 46 55 60 52.5 48.5 101 55 68 1/4, 3/8 VCW32 30 50

Environment

20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.

Ejector Valve Unit, Series ZYY/ZYX

Y 3 X 3 ZZY 45 J 1 U Note 1) With ejector Enter the following together with the manifold number: 1. Part No. of solenoid for SY3000/SX3000 2.

AC Servo Motor Driver (SSCNET Type)

Configuration Minimum equipment and wiring requirements to get started Provided 1 Ex) 200 V AC (*1) by customer 5 6 Provided 1 by customer 7 2 3 (-) PC 1 2 (+) 8 4 C D 11 21 9 11 U 2 Electric Actuators Ex) LEF V W 3 Provided by customer 10 (Positioning unit/Motion controller) (*1)Refer to LECSS Operation Manual, Chapter 3 if the power supply voltage is 100VAC. 1 Driver LECSS*-S* 2 Motor cable

SYJA3000

holes pitch) 4.3 22-M5 X 0.8 (Pilot port) 44 (Mounting holes) 2-M5 X 0.8 (Pilot port) A B A B 1 24 11 1 1 5 A B 1 10 R P 2.6 237.5(mounting holes pitch) (Mounting holes for manifold) 19 4 2 47 42 15 54 54 (Non-locking) Manual override 24.5 23 20 11.5 3 2.6 2(Mounting holes) 11 (Non-locking) Manual override 4-Rc(PT)1/8 33.5 46.5 46.5 21.8 (Bleed port) With filter (80 Mesh) 5-M5 X 0.8 (Piping

COQ2BP

J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread

CE2

2 3 4 3 2 1 Counter value 10-12-55

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Stopper Seal Bumper O-ring Drive bushing 2 Series KP Dimensions Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 3 4 4 5 6 7 10 11 12 13 KPH04-01 KPH04-02

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(The dimensions are marked .) 8-29-29 30 Series CXSW Dimensions; 25, 32 CXSW25 ZZ SS 12 S 12 12 12 30 (30) Z 6 30 2-R3.5 2-M8 x 1.25 x 6l (Hexagon socket head set screw) 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 80 64 35 6.3 5 2-R3.5 2-6.9 through 2-11 counterbore depth 6.3 8 12 14 4-M6 x 1 (Through-hole) 4-M5 x 0.8 thread depth 7.5 2-M6 x 1 x 18.5l, 2-M6 x 1 (Hexagon bolt) (Hexagon nut) 2-M6

Air Cylinder

8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6

Compact Cylinder with Air Cushion Series RQ

H I J K L M N Bore size (mm) 32 40 50 Stroke range (mm) 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1