VZ5000

Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Adapter plate ARBZ5000-00-P Gasket Individual SUP Spacer Assembly Round head combination screw DXT199-35-1A ( ) With spring washer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

LEY-OM007

/LEY /P.13,14 3.1 /LEYG 2 /code1-196 2 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 3 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG / 4 / P.41 7.2 / P.42 7.2 5 6 /P.35 5. 7 8 0 () /P.21 4.3[] 9 /P.21 4.3[] /P32 4.4 INC/ /P.21 4.3[] 11 /P.44 7.3 12 /P.45 7.3 No. 2 / 1 -51- 15ms 2 IN* 30ms No.

Cylinder with Lock

10.5 D-Z7/Z80 7.5 8.5 7.5 9.5 9.5 10.5 D-A5/A6 9 9 10 11 11 11 D-A59W 13 13 13 14 14 15 D-A3/A44 9 9 10 11 11 11 *1 The switch mounting bolt is supplied with the switch. * Values which include hysteresis are for reference purposes only.

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:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ . (mm)" : 14 145 43 19 190 l DO 23D 15 M14 x 1.5 15 47 143 115 32 71 125 Up to 1600 50 Upto . jOOQ 1 60 43 19 20 212 112 255 ~5 M1 4 x " :1:.5 '15. 47 1'57 126 32 71 SO 14\1': 19 11 6 275 53 177 180 144 78.5 42 20 236 18 M16 x 1.5 15 Up to 1600 38 160 56 'Boresize wI !

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

MHZ

32 30 MHY 0.02 16.8 MHW MRHQ +2.4 0 0 -0.4 36 (42) 20 18 Misc.

DOC1001322

Displays the run and stop status of the product. (4) Operating condition display P.5-11 (5) Compressor operating condition display Displays the run and stop status of the compressor. P.5-11 (6) Pump Operating condition display Displays the run and stop status of the pump.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

P=10.5 9 Manual override L2 3.5 L1 (Non-locking) Manual override 42 [48.5] 29.6 23 13.5 [ ] for AC L type plug connector (L) M type plug connector (M) (Lead wire length) 42 About 300 About 300 53.1 [59.6] (Lead wire length) 42 [48.5] 92.3 [94.9] 79.4 [82] 1 111.6 53.2 [54.5] 98.6 1 62.8 [ ] for AC Other dimensions are the same as the grommet type.

CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

10

In the case of obtaining an accurate flow rate, refer to pages 38 through to 42.

5 Port Solenoid Valve

It may cause malfunction or damage. 11. Use this product within the specified ambient temperature range. This may cause malfunction. 12. Do not use in places where there is radiated heat around it. Such a place is likely to cause malfunction. 42 Series EX260 Specific Product Precautions 3 Be sure to read before handling.

Modular F.R.L. Unit

AKM2000 1/8, 1/4 40 40 28 11 11 AC20, AC20A AKM3000 1/8, 1/4 53 48 34 14 13 AC25, AC25A AC30, AC30A AKM4000 1/4, 3/8 70 54 42 18 15 AC40, AC40A Note) How to Order Note) Not applicable to AC40-06.

Refrigerated Air Dryers

kg A 4 x 11 220 [mm] IDF-TR 8 C E G Specifications/Dimensions B Part no.

3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

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:'11 \ooOD I . ., 1 ;' Nlodo6 ~~ " BK; :t.laXQ7 E :MijXOB y P.;pglicable tube, 0.0 G H 1>1;1 <0 . El 4 5 g ZPY2O!' 20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...)

Free Mount Cylinder for Vacuum Series ZCUK

Note 1) In the case of ZCUKD16-5D: 14.5 mm. 26 14 4.5 4 2 12 30 (40) 19.5 7.6 depth 6.5 3.5 15.5 75.5 (85.5) 5 29 33 42 16 20 24 6 8 10 5.5 5.5 6.6 9 9 13.5 4.5 4.5 4.5 16 20 24 36 (46) 40 (50) 42 (52) 21 21 22 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 5 5 19.5 24.5 30.5 86 (96) 94 (104) 106 (116) 1258 Free Mount Cylinder for Vacuum Series ZCUK Vacuum Piping: Rod Piping/Rod End Shape: Male

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

25 5, 10 Rear Flange L1 Without auto switch A 26 26 32 35.5 With auto switch A 31 31 42 45.5 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 11.5 11.5 12.5 14.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 3.5 3.5 4.5 5 5, 10 Double Clevis Without auto switch With auto switch A 40.5 41.5 51 57.5

7

11 13 37.5 42.5 25 25 22 27 49.5 (55) 3 A VXD2 27 108 77 47.5 Model Mounting bracket dimensions Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions. 148 Pilot Operated 2 Port Solenoid Valve VXD Series High temperature oil Heated water 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet 300 U E C (42) 40 VX2