VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

Compact Cylinder

) 32, 40 50, 63 10 +0.058 0 18 0.3 0.5 14 +0.070 0 22 0.3 0.5 Applicable bore size (mm) A1 E1 L1 MM RR1 U1 Part no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs

3 Port Solenoid Valve

18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6 83.2 10 86.8 90.4 11 94 97.6 13 108.4 112 14 115.6 119.2 15 122.8 126.4 16 130 133.6 17 137.2 140.8 18 144.4 148 20 158.8 162.4 L1 L2 8 3 Port Solenoid Valve Series S070/ Base Mounted Manifold Bar Base Specification How to Order Manifold

ZR

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

ML1

40 Mounting position Series Series Lead wire clamp Lead wire cap A 124.8 148.8 173.8 LP-01 ML1C ML1C LC-01 B 113.2 137.2 162.2 25 32 40 Mounting position Series ML1C 177.5 A 128.5 152.5 B 123.5 147.5 172.5 4.7-11

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

ZSE2/ISE2

trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 784 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Connector type: ISE2-15C Grommet type: ISE2-15 01 T1 01 T1 Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 Indicator light (Red) Indicator light (Red) 20 20 600 (3000) 600 (3000) ZSE ISE ZSP

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

Vacuum Gripper

29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

HRX-OM-K003

C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM

5 Port Solenoid Valve

Oki Electric Cable Co., Ltd. 17 17 Station 9 Station 9 SOL.B SOL.B 18 18 SOL.A 19 Station 10 SOL.B COM. 20 19 SOL.A COM. 21 20 Station 11 SOL.B 22 SOL.A 23 Station 12 SOL.B 24 Special Wiring Specifications (Option) COM. 25 COM. 26 COM COM 25 26 COM COM 23 24 21 22 Mixed single and double wiring are available as options.

Ionizer

Horizontal mounting Downward mounting 83 27 94 27 26 32 Center bracket/IZS31-BM Reduced-wiring Fieldbus System 40 15 23 14 3 5.4 18 24 39 Static Neutralization Equipment M5 screw for mounting 2 Ionizer 27 100 Alphabetical Index Length Measuring/ Counter Angle adjustable Ionizer full length (L) Note) Number of center brackets included in a model with brackets.

EXxx-OMU0020CN

Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics 01() 1 Valve 18, 19 diagnostics 01() 2 Valve 20, 21 diagnostics 01() 3 Valve 22, 23 diagnostics 01() 4 Valve 24, 25 diagnostics 01() 5 Valve 26, 27 diagnostics 01() 6 Valve 28, 29 diagnostics 01() 7 Valve 30, 31 diagnostics 01() 36 No.EX-OMU0020CN 5.1.2.

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

Speed Controller with

Metric size Inch size Air 1.5 MPa (1.05 MPa Note 1)) 1 MPa (0.7 MPa Note 1)) 0.1 MPa 5 to 60C (No freezing) Applicable cylinder bore size (mm) 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" AS1002F AS2002F AS2052F AS3002F AS4002F 6, 10, 16, 20 Note) 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Note 2) Nylon, Soft nylon, Polyurethane Applicable tube material Note 1) In case of AS1002F

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

32, 40, 50, 63, 80 and 100.) 8-21-18 18 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !