CV/MVGQ 20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 MK(2) RS Q G Bore size (mm) LL MM N Q S W H ZZ d e f h With rod boot Without rod boot l ZZ RS H A 40 50 63 80 100 86 83 83 84 85 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 38 43.5 49 63 73 84 90 98 116
20 8 11 11 13 16 100 110 130 160 180 42 50 59 76 92 80 90 105 130 150 60 70 86 102 116 12 12 15 18 18 9 9 11.5 13.5 13.5 32 40 40 52 52 16 20 20 25 30 44 52 64 78 92 Up to 600 601 to 1000 MK(2) Up to 750 751 to 1000 Up to 750 751 to 1000 RS Q G Bore size (mm) LL MM N Q S W H ZZ d e f h With rod boot Without rod boot l ZZ RS H A 40 50 63 80 100 86 83 83 84 85 M14 x 1.5 M18 x 1.5 M18 x
20 20 E-MY2HT16 10 10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25 10 10
Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time Constant
Applicable Pad Diameter Symbol Breadth x Length (mm) 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 Symbol Breadth x Length (mm) 3.5 x 7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 3507 4010 4020 4030 5010 5020 5030 6010 6020 6030 8020 8030 Dimensions Series ZPT Series ZPR Series ZPY Long dia.
SY5000222-1A [for 10 valves (20 pcs.)] SY7000221-1A [for 10 valves (30 pcs.)] SY3000222-1A [for 10 valves (20 pcs.)] SY5000221-1A [for 10 valves (20 pcs.)] SY300023-24A [for 10 valves (20 pcs.)]
35% to 85% 5 to 20 60% to 95% Lead 16: LEY32A 112 Force [lbf] 21 to 50 60% to 85% 21 to 50 80% to 95% 90 1 to 4 20% to 65% 1 to 4 40% to 95% 67.4 LEY25lA LEY25l 5 to 20 35% to 65% 5 to 20 60% to 95% 45 21 to 35 50% to 65% 21 to 35 80% to 95% 22.5 1 to 4 20% to 85% 030 40 50 60 70 80 90 LEY32l 5 to 20 35% to 85% Set value of pushing force [%] 21 to 30 60% to 85% Max. 85% Note) For the vertical
B A IN OUT M 2 x P Port size I J F K L (D) (mm) Model Conduit Conduit terminal Electrical entry Port size P A B C E F I J K L U D M V 62.5 (68.5) T T 62.5 (68.5) 126.5 (134.5) 76.5 (84.5) 76.5 (84.5) U 107.5 (113.5) 29 5 C VXD2 30 71 20 4.5 17 51 32.5 38.5 35 3/4 108 77 47.5 6 D VXD2 1 33 35 95 22 4.5 20 59.5 45.5 49.5 42 110.5 79.5 50 ( ): Denotes the Normally Open (N.O.) dimensions. 152
(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5
A A1 E1 L1 MM RR1 U1 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 16 20 Y-G02 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 34 8.5 25 M8 x 1.25 10.3 11.5 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 20 I-G02 8 8 34 8.5 25 M8 x 1.25 10.3 11.5 8 20 25 Y-G03 41 10.5 30 M10 x 1.25 12.8 14 20 25 I-G03 10 10 41 10.5 30 M10 x 1.25 12.8 14 10 32, 40 Y-G04 42 16 22 30 M14 x
53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)
0.5, 1, 5, 10 20, 50, 75, 100 EH EB ES Plating fluids, General acids, Alkali fluids, Industrial water, Cooling water Polypropylene 0.5, 1, 5, 10 20, 50, 75, 100 EHM P.41 General acids, High-temperature fluids EHK Glass fiber 1, 5, 10, 20 Paper P.42 Cotton, Phenol impregnated, (Epoxy adhesion) 5, 10, 20 Hydraulic oil, Lubricating oil, Fuel oil EP Micromesh Stainless steel 304 (Epoxy adhesion
10 11 8 8 8 8 10 12 9 12 17 20 22 29 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 15 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 DNN P Q QA R T Y S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40
25 5 5 20 20 25 16 20 16 25 20 16 16 1 1 0.5 10 20 25 26 50 100 200 400 0.5 10 20 25 26 50 100 200 400 Stroke [mm] Stroke [mm] 460 Model Selection MGP Series Horizontal Mounting Ball Bushing (19) L = 50 mm, V = 200 mm/s or less (20) L = 100 mm, V = 200 mm/s or less MGPL16 to 25 MGPL16 to 25 10 10 25 25 25 20 25 20 5 5 20 16 20 Load mass m [kg] Load mass m [kg] 16 16 16 1 1 0.5 20 50 76 75
45 50 25 55 65 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 Up to 450 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 451 to 500 10 to 600 5 to 300 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10
$2 are for 20 to 40.
D M5 M5 x 0.8 Nil Rc Rc 1/8 VZ344(A), 2(B) port F G 20 20 stations 1(P) port M5 x 0.8 N NPT VZ35Rc 1/8 Z NPTE Applicable blanking plate assembly DXT192-13-1A Applicable individual EXH spacer assembly DXT192-21-1A Applicable individual SUP spacer assembly (Except VV5Z3-40 type) DXT192-40-1A Applicable interface regulator ARBZ3000-00-P How to Order Type 42 VV5Z3 05 C6 42 1 Stations 4(A),
Large variations may occur depending on the surrounding environment (variation on the order of 30%). 6 to 20 Auto switch model Bore size (mm) D-A9 A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 30 6 26 46 42 46 42 26 30 10 28 32 48 44 48 44 28 32 15 17.5 21.5 76.5 72.5 56.5 60.5 20 19.5 23.5 87.5 83.5 39.5 35.5 67.5 71.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25
(Refer to Specific Product Precautions 4 on the next page for details.) 1.5 01: R 1/8 T1: NPT 1/8 ZSE40(F)/ISE40 W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET R 6.5 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 For splash proof use (IP65), insert an air tube into the atmospheric release port.
20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.