CNG

52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB 141 (149) 88 5.5 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162

Cylinder with Lock Series CNG

52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J K KA MM NA PG PH PL S TA TB TC WA WB WH WW W XA XB M5 x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Process Pump

152 2 x M5 x 0.8 Thread depth 9 139 PA PA(P) 114 116 95 19 PAX PB PAF PAF 4 x 7 Bottom view of body PA PB AIR SUP (P1) Rc, NPT, G 1/8" FLUID OUT Rc, NPT, G 3/8" 119 106 13 79 39 14 AIR SUP (P2) Rc, NPT, G 1/8" FLUID IN Rc, NPT, G 3/8" 74 59 Foot (Option) Tube extension: PAF3413P13 P13N P13F 152 2 x M5 x 0.8 Thread depth 9 139 114 116 95 19 4 x 7 Bottom view of body (9.50) FLUID OUT 1/2"

MHF2

3 4 15 5 15 5 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 52 12-3-18 19 Series MHF2 Low Profile Air Gripper Dimensions MHF2-16D1 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK MHS M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Finger closing port Mounting thread MHC 26 74 10.6 MHT E

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x 0.8 thread depth 5.5 11 3 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 12 6 N x M5 x 0.8 thread depth 6 (Insert) 6 4 x M5 x

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

Possible to transfer a workpiece at low-speed.

6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 13 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M 8 x 1.25 12 M5 x 0.8 M 8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc

Fieldbus System

C3: 3.2 (SMC) C4: 4 (SMC) C6: 6 (SMC) N1: 1/8" (SMC) N3: 5/32" (SMC) N7: 1/4" (SMC) M5: M5 thread n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 223.5 234 244.5 255 265.5 276 286.5 297 104.2 114.7 125.2 135.7 146.2 156.7 167.2 177.7 188.2 198.7 209.2

CRB2/CRBU2/CRB1

(Example) For M4: L2 = 8mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 Shaft type Shaft type L1 = S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Symbol

SMC

x 0.8 thread depth 5.5 Operating port 2-M5 x 0.8 11 3 Vacuum sunction port M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA-M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end 12 6 N-M5 x 0.8 thread depth 6 (Insert) 6 4-M5 x 0.8 thread

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

CNG

52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Bore size (mm) 20 25 32 40 W J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x

Rotary Table/

6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 (mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M8 x 1.25 12 M5 x 0.8 M8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x