Series ZB Compact Vacuum Unit

Compact Vacuum Unit Series ZB RoHS How to Order Single Unit 5 L 0 2 K1 ZB 00 P1 C4 Vacuum Pump System 5 L 1 1 K1 ZB 04 P1 C4 Ejector Nominal Nozzle Size Rated Voltage Body Type 5 6 24 VDC 12 VDC Port specification Note 2) Symbol Applicable supply valve and standard supply pressure Body specification Nominal nozzle size Large flow (N.C.)

PFM7

2-Color Display Digital Flow Switch Series PFM7 Integrated display How to Order Integrated display PFM7 10 C4 A M Type Made to Order (Refer to page 907 and 940.) Integrated display 7 Rated flow range (Flow rate range) Option 2 (Refer to page 907.) 0.2 to 10 (5) l/min 0.5 to 25 (12.5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min 10 25 50 11 Option 1 (Refer to page 907.

2-Color Display High Precision

None Nil M5 x 0.8 NPT1/8 (With M5 female thread) N01 Bracket A Rc1/8, G1/8 A W1 Rc1/8 WF1 G1/8 Rc1/8, G1/8 Bracket B B M5 M5 x 0.8 (Female thread) M5 x 0.8 Bracket D C4 4 one-touch fitting D C6 6 one-touch fitting 4, 6 one-touch fitting Made to Order Panel mount adapter Combination of piping specifications with option 1 and part numbers of options 01 N01 W1 WF1 M5 C4 C6 Option 1 Description

Solenoid Valve

(mm) SQ1000 SQ2000 If it is difficult to loosen the screw, loosen it while 3.2 VVQ1000-50A-C3 pressing the valve gently on the area near the manual override. 4 VVQ1000-50A-C4 VVQ1000-51A-C4 6 VVQ1000-50A-C6 VVQ1000-51A-C6 Mounting and Removal of Manifold with 8 VVQ1000-51A-C8 *Part numbers above are for one fitting; however, order them in 10 piece units.

JSY1000/3000/5000 Series (Non Plug-in)

KQSY10-C4-X1336 (JSY1000) KQSY11-C6-X1336 (JSY1000) KQSY30-C8-X1336 (JSY3000) KQSY50-C12-X1336 (JSY5000) * It is not possible to replace C2 or C4 fittings with C6 fittings for the JSY1000 series. * Refer to page 18 for One-touch fitting, clip, and port plate part numbers. 15 No.JSY1000V-OMW0004-A JSY1000/3000/5000 series Specific Product Precautions 7 Be sure to read this before handling.

VQ1000V-OMV0001

No.VQ1000V-OMV0001 VQ1000/2000 V100 / / / / 2 3 4 5 4 5 5 5 6 6 6 6 7 89 10 11 -1No.VQ1000V-OMV0001 (ISO/IEC) (JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

02 to 10 as standard (11 to 20 requires manifold spec form), One-touch fittings:?

Add to Quote SMC AXT100-DR-10 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $13.64 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-11

Add to Quote SMC AXT100-DR-10 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $13.64 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-11

Add to Quote SMC AXT100-DR-10 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $13.64 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-11

Add to Quote SMC AXT100-DR-10 din rail, VV5Q* MANIFOLD VQ 4/5 PORT*** $13.64 + Add to Quote Add To Cart Add to Cart SMC AXT100-DR-11

Electric Actuator

Note 3) The Z phase first detecting position from the stroke end of the motor side. 11-LEFS40;;-200-; 11-LEFS40;;-200B-; 11-LEFS40;;-300-; 11-LEFS40;;-300B-; 11-LEFS40;;-400-; 11-LEFS40;;-400B-; 11-LEFS40;;-500-; 11-LEFS40;;-500B-; 11-LEFS40;;-600-; 11-LEFS40;;-600B-; 11-LEFS40;;-700-; 11-LEFS40;;-700B-; 11-LEFS40;;-800-; 11-LEFS40;;-800B-; 11-LEFS40;;-900-; 11-LEFS40;;-900B-; 11-LEFS40;;

LEC-OM02904

11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1 132 13.1.2 134 13.2 . 135 13.3 . 135 13.4 . 135 13.5

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

AC Servo Motor Driver

manual adjustment) . 7 8 7.4 Interpolation mode . 7 -11 8.

CRBU

11-3-4.

5 Port Solenoid Valve Series SV

Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

This specification is not available for the rotary actuator with auto switch unit. 2 d Body (B) (mm) (mm) M N Size d Size Q 10 9.5 8.5 3.4 10 M3 15 10 11 3.4 15 M3 Body (A) 20 13 14 4.5 20 M5 DQ N 30 A port B port (Standard) (Altered) A port 14 15.5 B port 5.5 30 M5 40 20 21 5.5 40 M5 M 113 Series CRBU2 Symbol: C4 Applicable to single vane style only Symbol: C3 Change the position of the

Electric Actuator

LECSB Positioning unit 24 VDC Note 2) Note 4) CN1 QD75D (Manufactured by Mitsubishi Electric) Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R+ 17 S/S NG 36 PULSE R 18