MLGP

Refer to pages 17 through 22 for safety instructions, actuator precaution and auto switch precautions. Holding the Unlocked Condition (20 through 32) Caution 1.

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

AC Servo Motor Driver (Pulse input type)

Parameter Configuration using Setup software (MR Configurator2TM)17 5.1 Setup software (MR Configurator2TM) . 17 5.1.1 Installation Method .17 5.2 Basic driver set-up for Initial Test Drive . 17 5.2.1 Start up the Setup software (MR Configurator2TM) .18 5.2.2 System Settings .19 5.2.3 Model Selection .19 5.2.4 Driver ON LINE Check .20 5.2.5 Help Function .20 5.3 Parameter setting (Driver

HRX-OM-R026

PV SV 5.21 Communication function HRSH Series 5-80 HRX-OM-R026 Chapter 5 Display and setting of various functions 46. Select contact output signal 1 function from the table below with [] key or [] key, and confirm by pressing SEL.

Environment

radius [mm] (Reference values) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.

Digital Flow Switch (Integrated display type) ( compatible)

Setting of switch operation 2_P/2_N (Page 46) (Display type) Setting of Add dEC1 dEC2 (Page 49) 3. Input of set values Setting of Setting of tP2L/tn2L Setting of Setting of tP_2/tn_2 P2L/n2L Setting of P_2/n_2 P2H/n2H P2/n2 tP2H/tn2H H_2 tH_2 WH2 (Page 49) tWH2 (Page 46) (Page 46) (Page 48) (Page 48 4.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IO-Link unit EX600-LBB1 (Class B) 3Ch 46 -94No.EX-OMX1011 EtherNet/IPTM configuration assembly The Configuration data per unit type is described below.

Clamp Cylinder Series CK1

thread depth 11 (for IA type) 15 CLK2 20 20 40 57 17 17 A 20 19.5 0.2 0.5 15 25 45 45 60 60 Material: Cast iron Material: Cast iron Unit: mm Part no.

Round Type Hydraulic Cylinder

I 4 x LD LH MM A K NC Width across flats NA Y X NB LT Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31

OMR0031

Refer to section 17.

Nozzle Type Ionizer

8 5 Width across flats 12 10.6 17 Nozzle Type Ionizer IZN10E Series Dimensions L-bracket IZN10-B1 17 (Mounting angle adjustable range) 40 2 x M3 7.5 2 x 3.4 2 x R10 25 5 40 50 Internal mounting 2 x 3.4 20.5 33 30 30 52 46 44 26 17 11 26 12 8 x 3.4 2 x Hexagon socket head cap screw M3 x 6 (Accessory) 40 5 22.7 Internal mounting Pivot mounting 21 33 30 (Mounting angle adjustable range) (83)

C92

60 70 85 G1/8 G1/4 G1/4 G3/8 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 13,5 15,5 17 17 58 64,5 77 80,5 M6 M6 M8 M8 10 14 18 18 5 7 8 8 23 27 30 31 11 11 14 14 74 84 90 98 17 19 24 24 10 10 10 10 32 40 50 63 C95 C92 CA1 C92KB-Stroke W CS1 Bore size (mm) AM D EE G H KK J K KW M N S SW VD WH ZZ B 22 24 32 32 30 32 40 40 12 16 20 20 G1/8 G1/4 G1/4 G3/8 13.5 15.5 17 17 58 64.5 77 80.5 M10 X 1.25

Compact 5-Port Solenoid Valve

12.5 14.5 Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions n L 17 18 19 20 21 22 23 24 L1 278.5 287.5 296.5 305.5 314.5 323.5 332.5 341.5 L2 196.4 205.4 214.4 223.4 232.4 241.4 250.4 259.4 L3 310.5 323 323 335.5 348 348 360.5 373 L4 300 312.5 312.5 325 337.5 337.5 350 362.5 L5 16 18 13.5 15 17 12.5 14 16 46 JSY1000/3000/5000 Series Type 10/Side Ported Dimensions

CA2

84 2.5 25 146 1/4 up to 600 11 35 32 70 27 52 20 13 40 12 17 58 47.3 61 M8 x 1.25 7 18 11 M18 x 1.5 19 30 17 90 2.5 25 159 3/8 up to 600 11 35 32 85 27 64 20 15.5 40 10 17 58 54.8 68.5 M10 x 1.25 7 18 14 M18 x 1.5 19 31 17 98 4 25 170 3/8 up to 750 13 40 37 102 32 78 25 18.5 52 14 21 71 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 116 4 40 204 1/2 up to 750 16 40 37 116 41 92 30 20 52

HRX-OM-Q026

PV SV 5.23 Communication Function HRSH Series 5-84 HRX-OM-Q026 Chapter 5 Display and Setting of Various Functions 46. Select a function with [] key or [] key, and press [SEL] to enter.

Cylinder with Lock Series CNS

(mm) Bore size Auto switch model Bore size (mm) Auto switch model 125 140 160 125 140 160 D-A9/A9V D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 12 12.5 11.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BS5-125 BS5-125 BS5-160 7 6.5 6.5 D-A5/A6/A59W D-F5/J5/F5NTL D-F5W/J59W D-F5BAL/F59F D-Z7/Z80 CLJ2 14 14.5 13 BT-12 BT-12 BT-16 D-A3/A44 D-A5/A6 10 10 10 CLM2 D-A3/A44 D-G39/K39 D-A59W 17 17 17 BS1-125 BS1

Piping: 41R (Base Mounted), Stations: 17 Stations, A, B Port: N3T (5/32" One-touch Fitting)

Stations: 17 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: None, CE Compliant: No

Stations: 17 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D (DIN Rail Mounting), CE Compliant: No