HRX-OM-W002

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

HRX-OM-X037

Setting range and default settings are shown in Table 5.4-13 Pump operation mode setting. (1) (2) (3) (4) (5) Pump operation mode setting Table 5.4-13 Pump operation mode setting No.

MGC

Refer to p.0-44 to 0-46 for common precautions of auto switch.

Stopper Cylinder

QA [mm] F 13 Tubing O.D. 6 B + Stroke R R 8 QB Stroke Q Bore size QA F Q QB QU QW 1.8 Stroke 20 Tubing O.D. QA F 13 KA KB Tubing O.D. 6 8 QB Stroke Q QU 32 6 7.5 20 13 38 60.5 40 6 8 24.5 13 42 68 50 8 9.5 26 16 50 82 29 1.8 Stroke 20 QW Tubing O.D. QA F 13 Tubing O.D. 6 QU 8 QB Stroke Q 29 1.8 Stroke 20 QW 32 to 50 20 Tubing O.D.

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

HRX-OM-Y098

Setting range and default settings are shown in Table 5.4-13 Pump operation mode setting. (1) (2) (3) (4) (5) Pump operation mode setting Table 5.4-13 Pump operation mode setting No. Indication Item Setting range Explanation (4) The pump operation is controlled to maintain the set pressure when control mode (operation mode) is set to [ ].

ML2B

Reed switch D-X 20Data 10-13-17

ML2B

Reed switch D-X 20Data 10-13-17

44

Width across flat Width across flat Effective area (mm2) 2 x Applicable tubing Weight (g) L M d Model H1 H2 KC M L I.D. 2.5 3 4 6 7.5 8 9 10 13 4 4 6 8 10 10 12 12 16 KFG2L0425-00 KFG2L0403-00 KFG2L0604-00 KFG2L0806-00 KFG2L1075-00 KFG2L1008-00 KFG2L1209-00 KFG2L1210-00 KFG2L1613-00 H1 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 7 8 13.3 5 8 13 28 47 46 51 48 89 d KK 9 12

39

size (mm) I K NA NB NC V VA VB VC NN S 50 63 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.

VXA21/22

F 32 40 E 25 30 D 11 13 C 10.5 13 [ ]: Individual pressure style 4.1-66 Direct Air Operated 3 Port Valve Series VXA31/32 For Air, Gas, Vacuum, Water and Oil Proper selection of body and sealing materials permits application of a wide variety of fluids.

PSxx-OMU0002CN

-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMU0002CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OMU0002CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (

Aluminum High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

EXxx-OMW0014CN

No.EX-OMW0014CN-A PROFINET SI / / EX245-SPN1A/2A/3A(SI ) EX245-DX1() EX245-DY1() EX245-LA1/LB1(IO-Link ) EX245-EA2-() 1. 11 1.1. 11 1.2. 12 2. 13 3. 14 3.1. 14 3.2. 16 4. 22 4.1. 22 4.2. 26 5. 30 5.1. 30 5.2. 34 6.SI 35 6.1. 35 6.2. 37 6.3. 39 6.4.LED 40 6.5. 43 7.EX245-DX1 46 7.1. 46 7.2. 47 7.3. 48 7.4. 48 7.5 LED 49 7.6. 50 8.EX245-DY1 51 8.1. 51 8.2. 52 8.3. 53 8.4. 53 8.5.LED

PSxx-OMU0008CN

-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -10No.PS-OMU0008CN-D OUT1 LCD OUT2 () LCD 4 ON/OFF ON/OFF (kPaMPa) -11No.PS-OMU0008CN-D digit() 1digit=1kPa 1,2,3,,99,100 1kPa -0.1001.000[MPa]F.S.=1.000(-0.100)=1.100[MPa]

5 Port Solenoid Valve Series SQ1000/2000

Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3, C4, C6 A, B port 43.5 58 P

Solid State Auto Switches

Weight (g) D-C73 D-C76 D-C80 Auto switch model 0.5 m (Nil) 3 m (L) 5 m (Z) 10 50 9 46 9 46 76 Lead wire length Dimensions (mm) 26 2 9 3.4 6.5 SMC 8 Indicator light D-C80 without indicator light 4.3 DD11.5 8 3.5 Most sensitive position 9.5 1631 Reed Auto Switch Band Mounting Style D-B53/D-B54/D-B64 Refer to SMC website for the details of the products conforming to the international standards

New

9/32 5/32 9/32 C8 VX220 2 C10 13/64 5/16 C10 25/64 13/64 VX230 3 5/16 C12 25/64 Note) Weight of grommet type.

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.