Table of Contents

44 45 46 46 47 48 49 50 50 51 52 54 56 56 57 58 58 59 60 How to Order .

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

Clamp Cylinder with Lock

(for IA type) 2 x M6 thread depth 11 (for YA type) 15 15 35 18 15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 20 20 17 17 40 A 20 20 19.5 0.2 0.5 15 45 60 25 45 60 A Part no.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

Digital Flow Switch

cover (Part no.: ZS-46-D) 47.8 50.8 33.5 34.5 20.2 11 R4.5 R4.5 33.5 34.5 21 42.4 Panel thickness 0.5 to 7 Power supply/output connection lead wire (Part no.: ZS-46-5L) Sensor connector (Part no.: ZS-28-CA-4) 5 12.35 Pin no.

Air Cylinder Series CS1

11 10 10 10 MB1 Since this is a guideline including hysteresis, not meant to be guaranteed.

MB1

(Refer to Rod boot/Air cushion on page 11.)

High performance type Step Motor Controller (Servo/24 VDC)

(The electric actuator starts the operation.) 9) AREA output is turned ON for the step data no.2 (at 170mm from the origin point). 10) AREA output is turned OFF for the step data no.2 (at 130mm from the origin point). 11) BUSY is turned OFF. (The electric actuator stops.) INP is turned ON. 53 No.JXC-OMY0002-A 11.

Plate Cylinder with Lock Series MLU

CD-MU02 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

mlu

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

MLU

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

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2.20 0.30 1/2 (15A) 10 11 2.20 0.30 Note) Weight of grommet type.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

IO-Link unit EX600-LBB1 (Class B) 3Ch 46 -94No.EX-OMX1011 EtherNet/IPTM configuration assembly The Configuration data per unit type is described below.

Series IDG

Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Individual SUP and EXH spacers can be mounted either on the top or the bottom. 1/4 SQ VFS Series Gasket Round head combination screw SX3000-22-9 (M2 x 39.5) SV2000-21-6 (M3 x 46) SV3000-21-3 (M4 x 53) SV2000-21-5 (M3 x 60) SV1000 SX3000-57-4 VFR SV2000 SY5000-11-15 VQ7 SV3000 SY7000-11-11 SV4000 SY9000-11-2 Individual SUP/EXH spacer assembly (Double-stack) 439 Single Valve/Sub-plate Type

LEC-OM02904

105 10.3.2 106 10.4 107 10.5 107 11 1-37 11.1 112 11.1.1 113 11.1.2 116 11.1.3 118 11.1.4 11-10 11.1.5 SSCNET 11-12 11.2 11-14 TM 11-17 11.3 MR Configurator2 11.4 LEC-MR-J3BAT 11-19 3 - 11.5 11-20 11.6 () 11-24 11.7 11-25 11.8 11-31 11.9 EMC() 11-34 12 121 125 12.1 122 12.2 123 12.3 124 12.3.1 124 12.4 124 12.5 125 13 131 136 13.1 132 13.1.1

MK

Refer to p.0-39 to 0-46 for Safety Instructions and actuator and auto switch precautions.

VZ100/300/500

Made to Order Specifications (For details, refer to page 4-6-46.) 4-6-14 15 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 External Pilot VZ300R JIS Symbol VZ31R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port.

Series: 1 (VQZ1000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting)

Series: 2 (VQZ2000), Stations: 11 Stations, Port Size: N3T (5/32" One-touch Fitting)