o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

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M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Vacuum Pad

Adapter part no. 8 8 M5 x 0.8 M5 x 0.8 2 5 5 5 M3 x 0.5 M5 x 0.8 M5 x 0.8 4 M3 x 0.5 16 3.5 16 4 1.8 Buffer Applicable Pad List 2 3 11 5 5 4 4 3 Mounting Adapter Part No. 0.8 1.5 1.8 1.5 0.4 1.8 1.4 3 4 2 5 6 Applicable pad part no. Applicable pad part no. Buffer Assembly Part No.

Table of Contents

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

Modular Type Regulators Series AR

A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

(mm) BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 ZG 15 16 18 22 26 ZF 20 21 28 32 41 BG ZE 5 8 10 14 17 CC 9.5 13.5 17.5 20 25 VB 4 4 5 6 6 AJ 9 9 11 13 13 UE 5.5 5.5 6.6 8.6 8.6 AH 9 12 15 18 20 UD 10 10 12 16 16 AG 26 27 33 35 45 FX 22 26 32 40 50 AF 35 36 44 48 58 BE 30 38 48 58 68 ZJ 3.5 4.5

0.4

Works SUNX Co., Ltd.: S-LINK (8 output points) DeviceNet OMRON Corp.: CompoBus/S (16 output points) OMRON Corp.: CompoBus/S (8 output points) CC-LINK S kit 1 to 8 stations 16 stations 16 1 to 4 stations 8 8 stations D side 1 to 8 stations 16 16 stations Serial transmission kit EX140 integrated-type (for output) serial transmission system (3) 1 to 4 stations 1 to 8 stations 8 16 8 stations

Floating Joint

-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

ZP

Form w 1 Material e Vacuum inlet r Connection Width across flats 12 thread A 10 A5 62 41 25 2.5 M5 x 0.8 21 8 4 16 63 42 26 10 N S U F GN GS 67 41 25 2.5 M6 x 1 26 8 4 16 68 42 26 25 74 48 30 3.5 40 83 57 39 6 25 A8 64 48 30 3.5 M8 x 1 16 12 4 40 73 57 39 6 N4 N6 U4 U6 C B Width across flats 7 ZP Y D A6 M5 x 0.8 Dimensions Per Vacuum Inlet D2 Model J K Fitting part min. hole size Vacuum inlet

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

Series KP/KPQ/KPG

-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4

Series KP/KPQ/KPG

-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 KPQY04-M5 KPQY04-01 KPQY04-02 KPQY06-M5 KPQY06-01 KPQY06-02 KPQY08-01 KPQY08-02 KPQY10-02 KPQY10-03 KPQY12-03 KPQY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 8 10 14 8 10 14 12 14 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 6 13 19 7 14 20 14 22 29 39 41 68 4 18 4 4 20.7 10.4