ZP

Pad form Flat/Flat with ribs Deep Bellows Stroke (mm) Vacuum entry port Model 04 06 08 04 06 08 04 06 08 2004, 3507, 4010 ZPR02 to 08 Thin section flat series (10 to 16) 38 6 39 38 39 10 ZPR10 to 16 39 40 39 40 40 41 10 ZPR20 25 54 55 56 55 56 57 57 58 59 ZPR32 ZPR40 ZPR50 56 61 126 132 57 58 127 128 62 138 145 63 139 146 129 133 10 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40

Speed Controller with Indicator

, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

AC Servo Motor Driver (Pulse input type/Positioning type ）

STARTUP 41 to 4-37 4.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

One-touch Fittings

P.41 KQ2W P.37 KQ2K Bulkhead union Bulkhead connector P.45 KQ2E P.45 KQ2E Use to connect a male thread and tubing through a panel, etc. Use to connect tubing through a panel, etc. Nipple Reducer nipple P.47 KQ2N P.47 KQ2N Use to connect One-touch fittings of different sizes. Use to connect One-touch fittings.

Plug-in/Plug Lead: Single Unit

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

BH2-080 BH2-100 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BDS-04M BDS-05M BDS-06M BDS-08M BDS-10M BD1-04M BD1-05M BD1-06M BH1-080 BH1-100 40 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 50 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) CH2E

Sine Cylinder Series REC

-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

SYJ300/500/700

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

Speed Controller with One-touch Fitting

(40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35) AS421F-04-10(S)A 10 1/2

Table of Contents

of 01 to 08 when the suffix 0 is removed, are the same as the solenoid valve model codes.

AC Servo Motor Driver (Network card type ）

40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F -8.5 -7.2 -6.0 -5.0 -4.1 -3.3 -2.5 -1.8 -1.2

VQ5000

27.5 27.5 41 41 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 2-6-7 8 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust

VFR

Max. 8 stations Individual Individual 8 Bottom 08 8 stations Option 3-5-17 18 Series VFR2000 Plug-in Type: With D-sub Connector (For wiring specifications, refer to page 3-5-8.)

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm2 Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPQR04-06 KPGR04-06 38.4 19.1 3 6 4 M A L 17 4 4 10.4 KPQR04-08 KPGR04-08 40.9 19.2 4 8 KPQR06-08 KPGR06-08 41.5 19.8 4 6 12.8 18.5 10 10 KPQR06-10 KPGR06-10 44 20.2 5 Applicable fitting size d 10 KPQR08-10 KPGR08-10 46 5 8 15.2 20.5

Table of Contents

Model no. of switch rail accessory is listed on pages 8-15-32 and 8-15-41.

SYJ300/500/700

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

NCG/CG1

Applicable bore (mm) 20 25, 32 40 50, 63 80 100 H1 B1 d C D NT-02 NT-03 NT-G04 NT-05 NT-08 NT-10 5 6 8 11 13 16 (15.0) (19.6) (21.9) (31.2) (37.0) (47.3) 12.5 16.5 18 26 31 39 13 17 19 27 32 41 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 l mm Material: Carbon steel Part no.