Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Series MXP Dimensions MXP16 Z 3 With metal stopper 2-M5 x 0.8 depth 8 V K 6.5 5 M G Max. 4 Max. 4 11 25 2-M4 x 0.7 depth 6 Stroke: S MXP16-20 Width across flats 3 Width across flats 8 Piping port A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8 depth 7 Prepared hole dia. 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting

Intrinsically Safe Valve

x 0.8 (External pilot port) 4 Insulator: Black () B A 17.5 35 B A Insulator: Red (+) PE X P EB EA Manual override 17 4.3 56 17 62.5 65 M5 x 0.8 (Pilot EXH port) 109.1 L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 66.5 (E-type) 28 5 x 1/4" (Piping port) L-type plug connector with cover (LL) 53-SY5140(R)-LL-02 L (Lead wire length) 104 Insulator: Red (+) Insulator

MLGP

44 50 63 5.5 5.5 7.5 10.5 200 200 200 25 24 44 44 300 300 300 M5 x 0.8 M5 x 0.8 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) 33 X XA XB YY YL Z st 25 25 < st 100 29 29 st 30 30 < st 100 100 < st 200 200 < st 300 300 < st 350 28 34 42 20 25 32 M6 x 1.0 12 12 16 39 39 3 4 4 17 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121

MLGP

weight m (kg) 50, 63 MLU 10 10 50, 63 40 40 40 40 ML1C 50, 63 40 D40 -X 32 32 32 32 32 32 204 10 50 51 100 101 200 200 300 300 4 10 50 51 100 101 Data Stroke (mm) Stroke (mm) MLGPL80/100 MLGPL80/100 40 40 100 100 100 80 Load weight m (kg) Load weight m (kg) 100 80 80 80 100 100 80 10 10 80 6 10 100 200 200 300 300 25 26 50 51 6 10 100 25 26 50 51 Stroke (mm) Stroke (mm) 9-11-17 17 Series

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

12.5 6 160.5 150 133.5 13.5 7 173 162.5 144 14.5 8 185.5 175 154.5 15.5 9 198 187.5 165 16.5 10 210.5 200 175.5 17.5 L1 L2 L3 L4 L1 L2 L3 L4 17 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60PD (26 pins) B1 2 Scale: 37% 2n1-M5 x 0.8 (A, B ports) [With external pilot] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7

Compact Cylinder with Solenoid Valve/

Bore size (mm) Stroke range (mm) OB P1 P2 Q RA RB S V W Y Z 32 40 50 63 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 59 38 5 to 100 9 M5 x 0.8 M5 x 0.8 2.5 10 7 12 43 43.5 67 46 5 to 100 11 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 14 8 17 54 63 83 58 10 to 100 14 Rc, G, NPT1/8 Rc, G, NPT1/8 3.5 18 10.5 17 54 63 97 69 10 to 100 6 Compact Cylinder with Solenoid Valve/Guide Rod Type Series CVQM Auto Switch

CXS

2 2 CXSM CXSL CXSM CXSL 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100 st CXSM CXSL Weight m (kg) 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang l (mm) 8-28-17 17 Dual Rod Cylinder: Compact Type Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping

CXS

Weight m (kg) 32 32 0.1 0.1 25 25 20 20 0 0.03 0 0.02 20 40 60 80 100 20 40 60 80 100 Overhang l (mm) Overhang l (mm) Graph (12) V = Up to 1000 mm/s; Up to 100 st CXSM CXSL Weight m (kg) 32 0.1 25 20 0 0.02 20 40 60 80 100 Overhang l (mm) 8-28-17 17 Dual Rod Cylinder: Compact Type Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

Sine Rodless Cylinder Series REBR Direct Mount Type

8 5 33 31.5 32 30 17 31 30 8.5 REBR25 12.5 9.5 5.2 3 1 27.8 8.5 10 44 42.5 44 41 23.5 43 14.5 41 6.5 23.5 REBR32 19.5 11 6.5 3 1.5 35 10.5 16 55 53.5 55 52 29 54 20 51 7 29 K L LD M N P PW QW T TC W WP J x E Q MM Model REBR15 14 53 4.3 5 6 M5 x 0.8 32 18 21 17 25 M5 x 0.8 x 7 84 M4 x 0.7 REBR25 15 70 5.6 6 6.5 Rc 1/8 43 20 25.5 22.5 40 21.5 M6 x 1 x 8 105 M5 x 0.8 REBR32 13 76 7 7 8.5

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 19 Dimensions p. 20 Function Details p. 34 Made to Order p. 38 Safety Instructions Back cover 8 1 Output 3-Screen Display High-Precision Digital Pressure Switch RoHS ZSE20(F)/ISE20 Series IP40 How to Order Rated pressure range ISE20 0.1 to 1 MPa M For positive pressure ISE20 M5 N For

3

to 63 Heated, Nickel plated 32 to 63 only 20 to 32 only 12, 16 only 40 to 63 only Sharp end section: 90 Nitriding Piston rod 5 Bushing Stop ring Copper bearing material Stainless steel Carbon tool steel Carbon tool steel 6 7 8 9 10 11 12 13 14 15 16 17 20 to 32 only Round R-type retaining ring C-type retaining ring Chromium molybdenum steel Hard steel Hexagon socket head cap screw Spring

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

BA 0 0.3 CA BA 0 0.3 Drawing of view E MM (mm) Bore size Z A NN S Y LB LC LH LT LX LY LZ X 85.5 6 15 15 17 3 8 12 11 28 16.5 4.5 9 1.6 24 16.5 32 24.5 7 M3 x 0.5 M8 x 1.0 57.5 5 T NA NB BA BB CA CB D F GA GB GC H 3 7 83 82 16 10 54 55 M12 x 1.0 M10 x 1.0 21.5 23 5.5 5.5 14 14 2.3 2.3 33 33 25 25 42 42 20.5 20.5 9.5 9.5 M5 x 0.8 M4 x 0.7 18.3 12 17 20 20 14 5 4 8 8 5 5 5 5 11 11 28 28 15

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

VKF300

VKF300-11A-2 For VKF334: VKF300-11A-1 8 3 4 For VKF33 : VKF300-6A-1 2 sets per unit required Bushing assembly 9 Resin 2 3 Port Direct Operated Poppet Series VKF300 Dimensions/Single Type Grommet: VKF332-GM5 01 DIN terminal: VKF332-DM5 01 Body ported type 17 Rc(PT) 1/8, M5 x 0.8 (port A) Manual override (non-locking) A A 18.5 20.5 1 Approx. 300 (lead wire length) 28.5 32 2.3 32 2.3 Max. 10

Compact Cylinder

24 20.5 6 6 26 4 25 M3 x 0.5 31 1.5 5 3.5 17 3.5 8 26.5 8 5 Compact Cylinder Double Acting, Single Rod JCQ Series Bore Size 20 to 40 Standard (Through-hole): JCQ, JCDQ 20 Both ends tapped: JCQA, JCDQA Both Ends Tapped [mm] O1 thread R R Bore size O1 R 20 M4 x 0.7 7 25 M4 x 0.7 7 32 M5 x 0.8 8 40 M5 x 0.8 8 Minimum lead wire bending radius 10 Auto switch F Q H thread effective depth C 4 x