Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M5N--Solid State , Gen. Purpose, 3 Wire NPN, LED, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector)

Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M5N--Solid State , Gen. Purpose, 3 Wire NPN, LED, Lead Wire or Prewired Connector: SBPC (0.5m Cord Length, M8-4 Pin Connector)

Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M5N--Solid State , Gen. Purpose, 3 Wire NPN, LED, Lead Wire or Prewired Connector: Z (5m)

Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M5N--Solid State , Gen. Purpose, 3 Wire NPN, LED

Band Mount: None, Rail Mount: None, Tie-rod Mount: None, Direct Mount: M5N--Solid State , Gen. Purpose, 3 Wire NPN, LED, Lead Wire or Prewired Connector: L (3m)

Air Fittings & Tubing

See p.2.2-15. 2.2-10 Series KQ2 Male connector: KQ2H 01-32 KQ2H03-32 07-32 01-32 KQ2H03-32 07-32 Tube O.D. (inch) M Min. hole dia. Thread UNF NPT H (Hex.) (1) Weight (g) Part No.

1

32 DeviceNet EtherCAT M12 M12 16 16 32 32 PROFINET M12 M12 16 16 PROFIBUS DP 32 32 EtherNet/IP M12 D-sub Note) 16 16 32 CC-Link M12 16 Note) Enclosure is IP40 when the communication connector is D-sub. eClamp bracket assembly Part no.

Table of Contents

Part No. 07 1/4" 09 5/16" Part no.

KQ2

P. 71 63 Series KQ2 Male Connector: KQ2H Note) 01-32 KQ2H03-32 07-32 H Connection thread UNF NPT 01-32 KQ2H03-32 07-32 Applicable tubing O.D.

LVQ

Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Min. d T H D1 D2 D3 L1 L2 L3 Model 1/8" ASD230FG-U10/32-01 8.4 12.9 29.4 17.5 5/32" ASD230FG-U10/32-03 9.3 10-32 UNF 25.5 25.8 25 22.2 8 28.3 28.6 7.8 11.7 9.6 10 16.5 35.2 3/16" ASD230FG-U10/32-05 11.4 23.3 13.5 32.6 1/4" ASD230FG-U10/32-07 12 20.7 34.6 16.5 39.6 14 38.5 3/16" ASD330FG-N01-05S 11.6 23.9 31.1 32 27 12.7 17 36.1 10.6 14.2 42.2 1/4" ASD330FG-N01-07S 13.2 25.6 11.8 NPT1/8 33.9

VM

Push button VM1010-4N-32 VM1010-4NU-32 VM1110-4N-32 VM1110-4NU-32 JIS Symbol/2 port 3 port Panel mounting hole 0.5 MPa supply Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4NU-32 VM1010-4NU-32 VM1110-4N-32 VM1010-4N-32 Bottom ported 3 port 2 port 6 N F.O.F.

VM

Push button VM1010-4N-32 VM1010-4NU-32 VM1110-4N-32 VM1110-4NU-32 JIS Symbol/2 port 3 port Panel mounting hole 0.5 MPa supply Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4NU-32 VM1010-4NU-32 VM1110-4N-32 VM1010-4N-32 Bottom ported 3 port 2 port 6 N F.O.F.

Piping: Base Mounted Common SUP Common EXH, Stations: 7 Stations, A B Port Size: Base Mounted M5X0.8 NPT

Vacuum Unit

For nozzle size 07 to 12, the value is common to the ejectors with valve and without valve. Max.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

ASD230FG-U10/32-01 12 1/8" 8.4 12.9 29.4 17.5 ASD230FG-U10/32-03 13 5/32" 9.3 10-32 UNF 25.5 25.8 25 22.2 8 28.3 28.6 7.8 11.7 9.6 10 ASD230FG-U10/32-05 16.5 35.2 15 3/16" 11.4 23.3 ASD230FG-U10/32-07 13.5 32.6 13 1/4" 12 20.7 34.6 ASD330FG-N01-05S 16.5 39.6 14 38.5 30 3/16" 11.6 23.9 ASD330FG-N01-07S 30.2 32 27 12.7 17 35.2 10.6 14.2 42.2 1/4" NPT 1/8 13.2 25.6 11.8 33.9 38.9 15.8 31 ASD330FG-N01

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

AS-FG/ASD-FG

Min. d T H D1 D2 D3 L1 L2 L3 Model 1/8" 8.4 ASD230FG-U10/32-01 12.9 29.4 17.5 5/32" 9.3 ASD230FG-U10/32-03 10-32 UNF 25.5 25.8 25 22.2 8 28.3 28.6 7.8 11.7 9.6 10 16.5 35.2 3/16" 11.4 23.3 ASD230FG-U10/32-05 13.5 32.6 1/4" 12 20.7 ASD230FG-U10/32-07 34.6 16.5 39.6 14 38.5 3/16" 11.6 23.9 ASD330FG-N01-05S 31.1 32 27 12.7 17 36.1 10.6 14.2 42.2 1/4" 13.2 25.6 ASD330FG-N01-07S 11.8 NPT1/8 33.9

Compact Manifold Regulator Series ARM5

IN/OUT Piping Position ARX20 Metric size Inch size Configuration Symbol Pressure gauge Note) VCHR 4 6 4 4 6 6 4 6 Straight Elbow Straight Elbow OUT side IN side IN side Straight Elbow Straight Elbow OUT side Mounting position Mounting position Fitting type Fitting type ITV 5/32 1/4 5/32 5/32 1/4 1/4 5/32 1/4 Nil Symbol Symbol None 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69 70 75 76

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3