VFS Description Material Return spring Gasket Stainless steel NBR VFS3000-17-1 VFS3000-20 VFS3000-20 VFS3000-17-2 VFS3000-20 o !0 !1 Hexagon socket head screw Steel M3 x 32 M3 x 32 M3 x 32 !2 Detent assembly VFS3000-9A Refer to How to Order Pilot Valve Assembly on page 3-8-54. Pilot valve assembly !
(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.
How ttt Order Applicable valves Type 20 NVJ312-O-M3 NVJ3120-O-M3 NVJ322-O-M3 NVJ3220-O-M3 Type 20 and 2OR Internal pilot type NW3J3-2 External pilot type NVv3Jc-2oR@ Type 20 Type 208 Type 2OR NVJ312R-O-M3 NVJ322R-O-M3 |[0ldl!
How ttt Order Applicable valves Type 20 NVJ312-O-M3 NVJ3120-O-M3 NVJ322-O-M3 NVJ3220-O-M3 Type 20 and 2OR Internal pilot type NW3J3-2 External pilot type NVv3Jc-2oR@ Type 20 Type 208 Type 2OR NVJ312R-O-M3 NVJ322R-O-M3 |[0ldl!
How ttt Order Applicable valves Type 20 NVJ312-O-M3 NVJ3120-O-M3 NVJ322-O-M3 NVJ3220-O-M3 Type 20 and 2OR Internal pilot type NW3J3-2 External pilot type NVv3Jc-2oR@ Type 20 Type 208 Type 2OR NVJ312R-O-M3 NVJ322R-O-M3 |[0ldl!
50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510/550 Parts list No. 1 2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR Stainless steel PBT PBT Flow direction PF2A711/721/751 PF2A511/521/551 Parts list Material ADC
Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-69.
10 20 10 11 16 21 26 31 36 41 1 6 16 9.5 19 MB1 16 11 16 21 26 31 36 41 1 6 18 12 24 CA2 Applicable Auto Switches: D-M9, D-M9V, D-M9W, D-M9WV B (When detecting at retracted stroke end position) (mm) CS1 Bore size A (When detecting at extended stroke end position) 5 st H1 H2 H3 10 st 15 st 20 st 25 st 30 st 35 st 40 st CS2 4 14 19 4 9 14.5 11.5 23 6 15 20 25 30 5 10 15 11.5 23 10 15 20
screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 208 (For 200 to 1000 strokes) 85 (For 100 to 150 strokes) 92 C section detail (S=2/1) Dimension table 1) The motor mounting plate and coupling are attached but no motor, controller,
port, E = Side ported 12-2-31 31 Series MHZ2 Dimensions MHZ2-6 Double acting/Single acting Basic type 2-M3 x 0.5 through (Mounting thread) Prepared hole dia. 2.6 through (Mounting hole) 0 0.1 When open 12 1 4 20 12 20 When closed 8 0 0.4 0 0.05 0.05 10 11 25.5 +0.022 0 7H8 depth 1.5 38.8 53 M3 x 0.5 (Finger closing port) M3 x 0.5 (Finger opening port) 4-M2 x 0.4 (Thread for mounting attachment
port, E = Side ported 12-2-31 31 Series MHZ2 Dimensions MHZ2-6 Double acting/Single acting Basic type 2-M3 x 0.5 through (Mounting thread) Prepared hole dia. 2.6 through (Mounting hole) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0.1 When open 12 1 4 20 12
VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ... Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold.
pins) Common Common Common Common 20 26 19 25 SOL.
12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18 22 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 5 6 8 10 7 7 7 9 10 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 15 16.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 4 9 9 13.5 2
20 to 40 Note) Dynamic viscosity: 50 mm2/s or less 10 Direct Operated 3 Port Solenoid Valve Series VX31/32/33 For Oil / Single Unit How to Order (Single Unit) For Air Specifications For Water For Oil For Steam For Vacuum Pad Construction Dimensions 1 01 G VX 1 4 31 VX 1 4 31 A A 01 G 1 1 DC, AC/Class H coil R1 AC/Class B coil (Built-in full-wave rectifier type) Model Refer to Table (1) shown
Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.
30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.
B C 0.70 0.16 VQ1 01 25 or less 33 or less 0.16 47 or less 0.20 0.20 0.70 Rubber seal 2.0 0.46 VQ2100 22 or less 29 or less 0.60 49or less 0.15 0.15 2.6 Metal seal 90 Single 2 position 2.2 0.55 VQ2101 24 or less 31 or less 0.80 51or less 0.30 0.28 3.2 Rubber seal 2.0 0.46 VQ2200 15 or less 20 or less 0.60 20 or less 0.15 0.15 2.6 Metal seal Double 2.2 0.55 VQ2201 20 or less 26 or less 0.80
mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.
5 (Z) 20 (20) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 5 7 8.5 (mm) 7 2-5.1 Z ZZ SS S Model CXSW10-10 CXSW10-20 CXSW10-30 CXSW10-40 CXSW10-50 CXSW10-75 CXSW10-100 CXSW10-125 CXSW10-150 30 30 92 136 52 10 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) Standard stroke Long stroke (-XB11) 102 20 156 62 112 176 30 72 (Z) 122 196 82 40 4-M3 x 0.5 thread depth 5 4 (20