3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

The DIN rail is approximately 30mm longer than the length of manifold. 1.25 L dimension L=12.5n+10.5 35.5 1 23 No. 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 L 260.5 No.

IDX-OM-W053

(1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4. GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i 48 Series PF2D Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A Internal circuits and wiring examples z to , are the terminal numbers. 4-4.5 Display unit (PF2D30/31) Sensor unit 52 1 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 8 4 Load + 12 to 24 VDC White 7 3 Black 5 1 Blue 18

PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

2–4

mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

ML2B

Reed switch D-X 20Data 10-13-17

ML2B

Reed switch D-X 20Data 10-13-17

Electric Actuator / Slider Type 《 AC Servo Motor 》

Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

Modular Type Air Filter Series AF

Note 2) When the compressor oil mist discharge concentration is 30mg/m3 (ANR). Accessory part no. Accessory Applicable model AFD20 AFD30 AFD40 AFD40-06 AFD40 Note 1) Bracket assembly AF20P-050AS AD27 AF30P-050AS AD38 AD38NNote 3) AF40P-050AS AD48 AD48NNote 3) AF40P-070AS AD48 AD48NNote 3) N.O. N.C.

Compact manifold regulator ARM5 Series

Tightening torque for round head Phillips screws for tie-rods of the regulator manifold. 0.32 0.03N.m M3 thread Square nut (M3) Square nut (M3) Note) M3 threads and square nuts are not included. End block 0.32 0.03 N.m Round head Phillips screw (with SW) (M3) 3. Tightening torque for hexagon socket set screws for DIN rail of the regulator manifold DIN rail 2.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting

Speed Controller with

Accessory: Cross Recessed Round Head Screw for Mounting (Zinc chromated) Model Size (Nominal x Length) Piece Metric size Inch size TMH-01J TMH-03J TMH-07J TMH-07 TMH-09 TMH-23J TMH-04J TMH-06J TMH-06 TMH-08 TMH-10 TMH-12 M3 x 15 M3 x 20 1 M4 x 25 M4 x 35 TMH-13 Series Holder mounting Select the applicable holder/TMH for each speed controller from the below table.

Rotary Table

Maintenance and Inspection 31 Regular check 31 Interval of inspection 32 Troubleshooting -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Intrinsically Safe Valve

Model Thread size Tightening torque 0.6 lbfft [0.8 Nm] 1.0 lbfft [1.4 Nm] 0.6 lbfft [0.8 Nm] 53-SY5000 53-SY7000 53-SY9000 M3 M4 M3 39 Series 53-SY5000/7000/9000 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Precautions and Handling Precautions for SMC Products (M-E03-3) for 3/4/5 Port Solenoid Valves Precautions.

VCW

A Round head combination screw M3 2 1 + "+" mark "" mark A Round head combination screw M3 Conduit terminal View A-A (Internal connection diagram) There is polarity only when equipped with light.

RSH

REA REC 32, 50, 63, 80 20 RHC MTS Guide rod CC Mounting Set screw (M3) Caution qDo not apply rotational torque to the cylinder rod. Install so that the cylinder's contact surface will be parallel to the pallet's contact surface to prevent rotational torque from being applied on the cylinder rod.

MRHQ

L M9NL Refer to page 12-13-1 for further information on auto switches. Auto switches marked with a "" are made upon receipt of order.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

10 + 1/2ST 2-3.4 through 2-6.5 counter bore depth 3.3 3 3 OUT 9 2-1.2 x 12l AW (spring pin) 1 (16) 5.6 3.2 28 0.2 28 0.2 22.7 37 35 16 6.3 5 2.1 M3 x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth