CRQ2

M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)

CLK1

4 53 12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 102 + Stroke 55 6 Hole: 10H8 26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26

Stroke Reading Cylinder and Counter

V 12 V IC circuit Diagnostic indication (2-color indicator) Relay, PLC IC circuit 5 V, 12 V 12 V Yes Yes No Grommet 24 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V A96V A96 IC circuit 5 V 12 V Grommet 24 V A93V2 A93 A90 100 V Relay, PLC 2-wire A90V IC circuit 100 V or less 1 Water resistant type auto switches can be mounted on the above models

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

M3 x 0.5 x 3L M8 x 1.25 x 8L (Bolt holder) (Hexagon socket head set screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 16 32 2-M3 x 0.5 through 6.5 counter bore depth 5 (Same on the opposite side) 3.4 through 3 3 45 45 5.5 M2.5 x 0.45 x 6L (Cap screw) M3 x 0.5 x 12.5L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2-M3 x 0.5 through Steel ball Plug 2-M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no

VQ4000

5 3 1 A B 30 45 14 3 5 1 12 25.6 Mounting hole Manual override 25.6 Mounting hole 30 45 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc1/8 External pilot port Rc1/8 PE port 19.5 (21) 19.5 (21) 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port Rc1/8 PE port 31 31 31 31 : 3 position ( ): Rc3/

Integrated Controller

Model Screw size Max. tightening torque [Nm] A [mm] L [mm] EQFS16 M3 0.6 3.5 23.5 EQFS25 M4 1.5 4.5 24 EQFS32 M5 3.0 5.5 30 EQFS40 M6 5.2 6.6 31 Body mounting Maintenance Warning Body mounting reference plane For housing B bottom Maintenance frequency Positioning pin (Reference plane) Perform maintenance according to the table below.

HRX-OM-W002

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

HRX-OM-X084

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

HRX-OM-X071

This produuct Your system Circulating fluid temperature 31 Serial communication Discharge temperature 31 Circulating fluid display temperature Heat 31 radiation 1 Circulating fluid set temperature 30 Offset temperature 30 1 Example of MODE 2 When the offset temperature is -1oC, circulating fluid display temperature and the communication data is 29oC (circulating fluid discharge temperature

Angular Air Gripper Series MHC2/MHCA2/MHCM2

) [M] MHCA2-6SM M3 x 0.5 Piping port End boss Ass'y 7.8 20 0.013 0.035 8f8 4 5 10 33 12 The specifications and dimensions not given above are identical with those of the standard type.

2–4

Example) Bolt M3 x 25 2 pcs. Mounting bolt OA thread Note) To install a through-hole type mounting bolt, bore size 12 to 25 mm, make sure to use the flat washer that is provided.

MRHQ

Rotary port B Rotary port A 12-11-5 6 Series MRHQ Model Selection Procedure Calculation Example Operating conditions 1 h O G Enumerate the operating conditions according to the mounting position and workpiece configuration. Please refer to page 12-11-12 for drawing dimensions.

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Rotary Actuator

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

Pin description 1 DC(+) 2 NC/Analog output 3 DC() 4 OUT 31

Compact Hydraulic Cylinder Series CH
KGB

10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 68 56 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40 79 65 14 22.4 19 16 M12 x 1.75 15 8 10 M10 x 1.5 20 50 85 70 15 28 24 21 M16 x 2 20 9.5 11.5 M12 x 1.75 24 63 95 77 18 35.5 31 27 M20 x 2.5 24 11.5 14 M16 x 2 24 80 109 88 21 45 39 36 M27 x 3 33 15 17 M18 x 2.5 27 100 132 106 26 56 48 41 M30 x 3.5 36 17.5

1

XSA1 4.5 6 XSA2 7 8 XSA3 10.5 11.5 Reverse pressure potential 0.5 MPa(G)*1 Weight New New 18% *1 XSA1-12 (Refer to the Specifications on page 3.) 0.5 kg 0.41 kg lighter *1 Rated voltage *1 XSA2-2 32 AC 100 V, 200 V, 110 V, 220 V, 240 V, 48 V, 24 V, 230 V DC 24 V, 12 V Applications Photovoltaic cell manufacturing Semiconductor manufacturing LCD manufacturing New New Female thread type (Rc,

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

screw) 31 0.5 45 45 3 3 5.3 5.3 250.2 250.2 32 16 2 x M3 x 0.5 through 6.5 counterbore depth 5 (Same on the opposite side) 3.4 through 3 3 45 5.5 45 M2.5 x 0.45 x 6 L (Hexagon socket head cap screw) M3 x 0.5 x 12.5 L (Hexagon bolt) and M3 x 0.5 (Hexagon nut) 2 x M3 x 0.5 through Steel ball Plug 2 x M3 x 0.5 through 2.75 (11) (10+ST) 250.2 4 Part no.