MQQ

(Except clevis style) B L F G C (1) MK(2) 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 RS Q G Dealing with the stroke by the 1 mm interval is available by installing a spacer with the standard stroke cylinder. RS H A Function D (2) Nil HNote) Standard type High speed/High frequency type (Without fixed orifice) RZQ Note) Except 6 mm bore size.

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Free Mount Cylinder

60, 70, 80, 90, 100 Weight/( ): Denotes the values with D-A93.

Title not found

AF10 to 60 auto drain (N.O.)AF3O to 60 Lubricator Description Applcable Body size 1000cm1lank AL30 to 60 T 0o0cn1l rank with eve swlch (lowest lm 1ON) AL30 to 60 10o0cm1lank with eve sw lch ilowest lm i OFF) AL30 to 60 Metal bowl ALI0 to 60 ALT 0 to 60 Nylon bowl I ncluding slghtdomel ALT 0 to 60 Thread type Mehic rhread ([45) Meta bow wih levelqaLrqe AL30 to 60 AL2O Flow direction: R qht

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

Vacuum Ejector Series ZM

ZM131H-K5LZ (-Q) ZM051H-K5LZ-E15 (-Q) ZM131H-K5LZ-E15 (-Q) ZM071H-K5LZ (-Q) ZM131M-K5LZ (-Q) ZM071H-K5LZ-E15 (-Q) ZM131M-K5LZ-E15 (-Q) ZM101H-K5LZ (-Q) ZM101H-K5LZ-E15 (-Q) 987 Series ZM Model Nozzle dia.

5

to step q.

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min) max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Vacuum

(Nr'min): o L o [ r 1 l Lr e_l r Q,Q , = Q r = S x 11.1 (N/min) o, mean suction flow of a an ejector (Ny'min max suction flow spec for the ejector from the catalog (Nr'min), Vacuum Eiector System Circuit flow capacity tor the piping system (Nd/ min), Q, S the etfective cross-sectional area of tubing based on inside diameter and total lenoth (mm,). See graph below.

Air Fittings & Tubing

(mm) a b (1) (1) Weight (g) D1 D2 L1 L2 P Q M1 M2 Part No.

KJ

w No. q w e r t y u i o !

Prevents Micro-Bubbles

J type fitting assembly procedure J type Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !

CA2

7 i q r e y @2 t !8 !9 !6 !1 !2 !4 !5 !0 !

ZP

q Pad dia.

AW

q q IN OUT IN OUT IN OUT u u r u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.

VCL

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size A B C D E F H K L M N Model Note) Note) Q R Q R Q R S Q R S U 22 (23) 45 (52) 44 43 58 40.5 46.5 99 43 66 83 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 1/8 VCL21 22 (23) 46 (53) 44 44 58 41.5 46.5 99 44 66 86 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 1/4 24 (25) 56.5 (63.5) 46 54.5 60 52 48.5 101 54.5 68 99 22

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26