)1.25 (at 20C)?

)1.25 (at 20C)?

)1.25 (at 20C)?

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

)2.5 (at 20C)?

20 to 9010(at 20C)5.0 (at 20C)?

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

IDX-OM-W022

,AC230V] [AC100V] POWER CORD POWER SUPPLY ENTRY(17) unitmm Model Thread Size A B C D E F G H J K L M N P Q IDU8E Rc3/4 270 485 859 31 902 365 1302 230 42 14 3002 80 3001 328 15 IDU11E Rc3/4 909 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330 66 470 358 16 IDU Series 6-3 Dimentions 6 4 IDX-OM-W022 Air Dryer 6 References 6-4 Electrical Circuit IDU8E-10 IDU8E/11E-20/23 PC PE L N TB ILS ILS PTC

KQ-OMS0022

Note2) The above data is based on a room temperature of 20C. Note that you may obtain different figures, depending on temperature conditions. Note3) The above data shows compatibility guidelines based upon component parts. Therefore, it is no guarantee of product performance. In addition, using fluids other than those specified in the catalog are not covered by the products warranty.

Low Profile

D-G

HAA

Correction Factor by Ambient Temperature Mounting Caution (Example) Inlet air temperature: 100C, Ambient temperature: 20C, Amount of air: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAA22-14 Outlet Air Temperature at Above Conditions Use outlet air temperature of 38.5C from outlet air temperature table. At this time correction factor line becomes . 1.

HAW

(Example) Inlet air temperature: 100C, Cooling water temperature: 20C, Cooling water flow: 17 l/min Air flow: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAW22-14 Outlet air temperature at above conditions Use outlet air temperature of 37C from outlet air temperature table. At this time correction factor line becomes .

In-line Air Filter ZFC Series

Metric size 2 3.2 3.2 4 4 6 6 8 10 12 Inch size 1/8" 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" 3/8" 0.8 Fluid Air, Nitrogen 0.6 Operating pressure 100 kPa to 1.0 MPa (at 20C) Flow rate (Positive pressure) [L/min] *1 15 45 50 80 100 200 250 450 550 650 0.4 Flow rate (Vacuum pressure) [L/min] 2 5 7 10 10 20 30 70 80 100 0.2 Proof pressure [MPa] 1.5 (at 20C) Operating and ambient temperature range

3 Port Solenoid Valve

D-DN This catalog is printed on recycled paper with concern for the global environment. Series 10-V100 Rubber seal 3 port direct operated solenoid valve Specifications Air Fluid Ambient and fluid temperature (C) 10 to 50 (With no freezing. Refer to page 714.)

New

D-DN