Process Pump

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

25

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

SYJA3000

11 (0.6) 2 position double 110 SYJA7220-01 Body ported Base mounted (With sub-plate) 8.5 (0.47) 9 (0.5) [6.5 (0.36)] 3 position closed center SYJA7320-01 1/8 M5 X 0.8 3 position exhaust center SYJA7420-01 120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7

VCS

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

PSxx-OMM0006CN

N01 R1/8 (M5 ) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E

Related Products: Holder Series TMH 1

Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

Related Products: Holder Series TMH 1

Applicable tubing size ASF 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 Can be mounted on the panel.

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

ZR

06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Port location Stations 01 R L Left side Right side 1 Arrangement (Right valve station which is looked from valve side is first station.)

ARJ310

ARJF310F-01 y e !

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option models