Compact Hydraulic Cylinder Series CH
KGB

35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88 17 45 41 M30 x 3.5 36 14 86 15 121 3/8 31 15 31 100 26 depth 17.5 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

MB1

Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 l h 9 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G MM

High Vacuum Angle Valve

With Bypass Valve (Flange size: 80) (40) 148.5 3 117 (40) I G H H V A C 117 A U U M E V V A L Lead wire length: 500 mm (L type: 3000 mm) (40) XLA-16-X65 e u t w y Pilot port: Rc1/8 Bypass valve adjustment nut (Initial exhaust) Adjustment pitch: 1 mm/rotation Shaft seal (FKM) r Scraper (FKM) Pilot port: M5 0.2 Lock nut Width across flats 13 96 90 235 (Max. 13) 7.5 8-2 112 114 83 8-1 i !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 Bore size (mm) 25 32 40 9 11 14 PP2 SS 5.1 4.0 9.0 PA PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5

Tamper Proof and Flat Head Screw

-11SD 12.8 17 17.9 31.8 43.3 21 3/8" 27.8 39.3 6 AS321F-03-08SD AS321F-N03-07SD 15.2 18.5 29.5 41 1/4" 13.2 27.8 39.3 17 8 R 3/8 19 23 9.8 53.7 1.2 47.7 20.9 AS321F-03-10SD AS321F-N03-09SD 18.5 21 31.8 43.3 NPT3/8 19 23 9.8 20.9 53.7 1.2 47.7 5/16" 15.2 29.5 41 18.5 10 AS321F-03-12SD AS321F-N03-11SD 20.9 22 32.8 44.3 17.9 31.8 43.3 21 3/8" 12 AS421F-04-10SD AS421F-N04-11SD 18.5 21 33.6 47.9

Thermo-con/Rack Mount Type

With Flow Switch p. 21 High-Pressure Pump Mounted p. 21 VOptional Accessories Power Supply Cable p. 22 Specific Product Precautions p. 23 4 HECR Series Model Selection Guide to Model Selection 1.

10

Made to Order (For details, refer to pages 16 to 21.)

CRBB-OM00004

It requires only two parts for mounting (see P211070-13).

CE2

150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52

Thermo-chiller

In locations where high frequency occurs 13. In locations where damage is likely to occur due to lightning 14.

Compact Manifold Regulator

Knob Position Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max.28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 51.5 6 51.5 80 13 OUT IN 3 28 13 13 OUT IN OUT IN 3 3 2. OUT Piping Position 3.

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

CJP

Mounting nut (Refer to page 6-2-13.)

CJP

Mounting nut (Refer to page 6-2-13.)

SFOD-OMT0005CN

(P.12) PLC (PLC) 2 11.4 (P.49) () () 3.2 (P.13) USB 10.(P.41) 5 10.(P.41) 10.(P.41) 3.(P.12) ( EMG ) 3.

Multi-Axis Step Motor Controller

Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Male Branch Tee: KPT Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Weight g Connection threads R M L2 D2 L1 2-Applicable tubing M L1 M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 6 7 8 9 12 13 20 21 24 27 KPT04-01 KPT04-02 KPT06-01 KPT06-02

CQS

For Safety Instructions and Actuator Precautions refer to pages 7-13-3 to 7-13-6.

PSxx-OMT0001CN

2 ISA3--B-R ISA3--B-R ISA3--B-RN ISA3--B-LN 1ISO16030 2ISO1179-1 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 C(4 ) C(6 ) F(G ) H 13 13.6 19 -24No.PS-OMT0001CN-E 2 ISA-17() Y200T-A() ISA-20() -25No.PS-OMT0001CN-E 2 ZS-31-B(()) ZS-31-C(()) ISA-21-() L 2 ISA-21-2 139 3 ISA-21-3 177 4 ISA-21-4 215 5 ISA-21-5 253 6 ISA-21-6 291 -26No.PS-OMT0001CN-E 3 SUP () (Nm) (Nm) ISA3 Rc1/8G1