IDX-OM-O004C

IDF15E1-10 (AC100V ) AC100V () IDF15E1-20 (AC200V ) L N PE M3 6.5mm 1.25mm 2 1 2 2. 2.1 ( ) 2 2 1 2. 2.2 2.2.1 (1) (85%) 240050 () 2000m (2) 2 2 2. 2.2.2 P.6-2 6.2 1 1 5 4 3 2 1 600mm 600mm 600mm 600mm 600mm 2 3 2. 2.2.3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 2.2.4 10mm ( ) 2 4 2. 2.2.5 6-1 IEC () IDF15E1-10(100V ) AC100V () [30mA 10A] IDF15E1-20(200V

Stroke Reading Cylinder and Counter

VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less 20 VA or less 10 W or less Between case and AC line: 1500 VAC for 1 min.

HRX-OM-R016

-(BJMT) . 9-5 9.3.2 HRS030-W-20-(BJMT) . 9-5 9.4 Cooling capacity . 9-6 9.4.1 HRS030--20-(BJMT) . 9-6 9.5 Heating capacity . 9-6 9.5.1 HRS030-A-20-(BJMT) . 9-6 9.5.2 HRS030-W-20-(BJMT) . 9-6 9.6 Pump capacity. 9-7 9.6.1 HRS030--20-(BJM) . 9-7 9.6.2 HRS030--20-T . 9-7 HRS Series HRX-OM-R016 Contents 9.6.3 HRS030--20-MT . 9-8 9.7 Required facility water flow (for water-cooled type) . 9-8 9.8

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

HRX-OM-O021

[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig. 9-6 Heating capacity(HRS050-W-20

HRX-OM-R005

capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS060-W-20-(BJM)) HRS Series 9.4 Cooling capacity 9-7 HRX-OM-R005 Chapter 9 Documents 9.6 Pump capacity 9.6.1 HRS060--20-(BJM) 0.7 70 0.6 60 Circulating fluid pressure[MPa]

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Max. load mass Review M1, M2, M3. M max is the allowable moment. 2 = M/M max 2. Static moment Review Me1, Me3. Me max is the allowable moment. 3 = Me/Me max 3.

•

l 15 :1-7 "140 177 144 42 19 20 236 118 275 18 M16x 1.5 \ 15 34 15 0160 Up to 1200 I 56 180 38 178.5 20 17 53 Bdre size MM N pis \VithOO1 (l}d bool\ With rod boot (Single side) (mm) (BotilSjjes,1 ZZ ZZ 341 364 341 364 367 388 1m,") H ZZ e f h 0125 M3D x 1 5 30.5 1!

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

180

point L (mm) 120 80 160 200 20 40 60 Gripping point L (mm) 80 0 20 40 60 Gripping point L (mm) 80 100 120 MHW2-25D MHW2-40D 160 50 Pressure 0.7 MPa Pressure 0.7 MPa MHZ 140 0.6 0.6 40 120 Gripping force (N) Gripping force (N) 0.5 0.5 MHF 100 30 0.4 0.4 80 0.3 MHL 0.3 0.2 20 60 0.2 40 MHR 10 20 MHK 0 20 40 60 Gripping point L (mm) 100 80 80 100 120 140 160 0 20 40 60 Gripping point L (mm)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQD 24V 12V 100V 200V 110V 220V 24V DC 12V DC 100V AC 200V AC 110V AC 220V AC AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 To remove manifold from DIN rail: 1) Loosen the clamp screw on the A side of both ends of the manifold. 2) Lift the A side of the manifold off the DIN rail and slide it in the direction of the B side.

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

Speed Controller with One-touch Fittings

M3 AS-34B AS-36B 4 4 AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 M4 4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are not included when L-bracket and DIN rail mounting bracket are ordered.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(Manifold specification sheet on page 41.)

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

HRX-OM-W002

. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .

HRX-OM-Y098

-A-20 .

HRX-OM-W060

Table 3.2-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of Differential temp. of Model radiation 3 oC between inside and 6 oC between inside and (kW) outside of installation outside of installation area area HRL100-A-20 Approx.18 305 155 HRL200-A-20 Approx.35 590 295 HRL300-A-20 Approx.45 760 380 Installation environment specifications

HRX-OM-X037

35oC 20 15 10 5 0 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [oC] Fig. 9-18 Cooling Capacity (HRL200-W-40 CH1) HRL Series 9.4 Cooling Capacity 9-17 HRX-OM-X037 Chapter 9 Documents 9.4.13 HRL100/200-W-40 CH2 3.0 2.5 Cooling capacity [kW] Ambienttemperature 45oC or less 2.0 (Max. 1.5 kW) 1.5 Rated 1.0 kW 1.0 0.5 0.0 10 15 20 25 30 35 40 Circulating fluid temperature [oC] Up to

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.