Compact Cylinder

With Magnet for Auto Switch With Magnet for Auto Switch Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more Male connector (with hexagon socket head) Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 or more 5 or more 5 or more AS121F-M3-04

Series KV2 Fittings

25.40 25.40 30.00 30.00 30.00 21.7 21.7 19.2 22.2 22.7 21.7 26.0 30.7 33.2 28.7 26.2 34.2 32.7 29.7 38.6 37.9 47.5 50.5 52.5 17.6 17.6 13.4 18.1 16.9 15.6 17.8 26.6 27.4 22.6 18.1 28.4 26.6 21.6 32.5 29.8 41.4 42.4 43.9 16 16 16 17 17 17 17 21 21 21 21 22 22 22 25 25 33 33 33 1.6 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 9.8 9.8 12.8 12.8 12.8 8 9 14 8 14 24 54 23 27 25 42 40 40 41

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

1

Clip Approx. 80 to 90 or b Auto switch mounting band Fig. 1-5 Fig. 1-4 a Switch holder Enlarged view of clip M2.5 set screw (Accessory) e i Auto switch r Reinforcing plates w q y u c M3 set screw 5.1 or more 0 to 5 t Reinforcing plates M3 set screw Nut M3 set screw Nut The end of the set screw is protruding.

PSxx-OMR0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

Slider Type Ball Screw Drive/11-LEFS Series

0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5 upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction

IDG

Specifications 0.01 m (95% filtered particle diameter) Filtration of outlet air Max. 0.1 mg/m3 (ANR) (0.08 ppm) Note) Outlet air oil mist concentration (Prior to oil saturated 0.01 mg/m3 (ANR) or less, (0.008 ppm or less)) Note) With inlet air oil mist concentration of 30 mg/m3 (ANR) (24 ppm) Applicable Model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

D-B5, B6 20 to 100 D-G5, K5, G5W D-K59W 20 to 100 Hs Hs 24.5 24.5 B A B A Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-G5/K59 D-G5W/K59W D-B5 D-B64 D-A9 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-M9 D-M9W D-A9 Bore size Bore size A 41 40.5 42 39 46 44.5 A 31.5 31 32.5 29.5 36.5 35 48 47 A 37 36.5

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Air Cylinder

Bore size d H B C D NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40/45 M14 x 1.5 8 22 25.4 21 NT-05 50/56/63/67 M18 x 1.5 11 27 31.2 26 NT-08 80/85 M22 x 1.5 13 32 37.0 31 NT-10 100 M26 x 1.5 16 41 47.3 39 5 JMB Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV Hs A Ht B [mm] Auto

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

VQ5000

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5

5 Port Solenoid Valve SY Series

In common Type 60 SY3 60 Cassette type Individual wiring SY5 60 P. 59 R Size and weight reduced by eliminating the manifold base + + P SY7 60 Type 41 Compact bar stock type Individual wiring SY3 40 SY5 40 + + + + P. 79 The base mounting facilitates maintenance after valves are changed.

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

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Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Modular F.R.L. Unit

Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5

3 Port Air Operated Valve

Port size: 1/4 1570 Air Operated Valve Common Exhaust Type 41 /Individual Exhaust Type 42 VPA300/500/700 Series VPA300 Series/Dimensions Type 41/Common exhaust: VV3PA3-411-02 Stations 72.5 24 2 x 6.5 (For mounting) N.C.