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Description Application 010 1 [m] SAPA Socket side: Angled Plug side: Angled 1 Communication connector (Port1/IN) Caution Connect PROFINET line. 030 3 [m] GW unit specifications 2 Communication connector (Port2/OUT) 050 5 [m] 100 10 [m] Power supply connector Connector to supply power to the output devices such as solenoid valves and input and control equipment such as sensors.

EX9-AC020EN -PSRJ Metal part Metal part Cable length (L) 010 1m 020 2m 030 3m 050 5m M12 RJ45 100 10m Communication connector Fig.

Please keep this manual handy for future reference. 010 1 [m] SAPA Socket side: Angled Plug side: Angled Communication cable 030 3 [m] 050 5 [m] 100 10 [m] LED PWR COM ERR L LED To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly.

System configuration How to order: EX500-AC 030 SSPS Cable length (L) 003 0.3 [m] Connector Power supply cable GW unit SSPS Socket side: Straight Plug side: Straight With SI unit Valve manifold (SY/SV/VQC/S0700 Series) 005 0.5 [m] Display Description 010 1 [m] SAPA Socket side: Angled Plug side: Angled LED is OFF The power supply for input and control is OFF PWR Thank you for purchasing an

PROFIBUS DP) EX600-SPRA (PROFIBUS DP) SI EX600-SDN (DeviceNet) EX600-SDNA (DeviceNet) EX600-SMJ (CC-Link) EX600-SEN (EtherNet/IP) EX600-DXB EX600-DXC EX600-DXD EX600-DXE EX600-DXF EX600-DYB EX600-DYE EX600-DYF EX600-DME EX600-DMF EX600-AXA EX600-AYA EX600-AMB -59No.EX-OMN0035CN-A A () SMC() URL http://www.smcworld.com (Global) http://www.smc.com.cn (China) 010

How to Order / Specifications 1) How to order Material Pressure gauge Symbol Symbol No symbol G Port size Seal material NBR FKM gauge No Pressure gauge Pressure Symbol 20 Element size Element included Symbol A B Port size Rc2 Model change symbol Element length 190L440 190L770 Nominal filtration Symbol 005 010 025 050 100 Nominal filtration 5m 10m 25m 50m 100m 2) Specifications Table 3-

ExIP8001-010-EW F With feedback lever unit for stroke 50 to 140mm. 2: When 52ATEX type specify symbol M, 2, 5, blue cable grant is equipped for electric connection. W With body cover window.

Grease weight GR-S-010 10g GR-S-020 20g -15- Basic Circuit for Cylinder Operation The basic circuit for operating the product with air filter, regulator, solenoid valve and speed controller (meter-out) is shown in the following figure. It is possible to use a quick exhaust. Regulator Air source Speed controller Air filter Solenoid valve .

D-M9BAV F7BA D-F7BA F7BAV D-F7BAV D-F79F 2 F79F F7NT D-F7NT 223 *1 AC100240V D DC24V C 05 5m 10 10m 15 15m 20 20m RS-232C B RS-232C + BCD *1)() C ()CE1 NPN PNP 2-3 CE1 CEU5 CE1 CEU5 CE1-R 23m 9 CE1 CE1-R*CE1 () () CE1 CE1-RC C () CE1 CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3. 3-1 1.5MPa 1.0MPa 12 2063 0.07MPa 0.05MPa 70500mm/s 060 2585RH 1220 3263 mm 010

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

Table 11 Parts applied with grease Grease applied parts Grease Cylinder internal surface Piston packing groove Piston packing Cover gasket End cover gasket Gasket Cushion packing GR-S-010 (Lithium mineral oil grease No.2) Pinion gear Dow coring Molykote BR2-Plus Piston Ass'y Size 10,15 Piston packing Piston packing Wear ring Size 20,30,40 Fig.17 Cover Ass'y Cover Packing Plate Cover gasket

For finger part: MH-G01 (30 g) For cylinder part: GR-S-010 (10 g) 14 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

Applied portion Ball screw Rail guide GR-S-010(10G) GR-S-020(20G) Dust seal band (When "Without" is selected for the grease application, grease is applied only on the back side. 27 - .

GR-S-010 (10g) GR-S-020 (20g) -11- LEKFS Motor : Parallel (AC servo motor) Component Parts Description No. Description Material Note No.

Ball screw shaft Approximately 6 months Grease pack order number (Arrange separately) GR-S-010 (10g), GR-S-020 (20g), GR-S-400 (400g) Please contact us for the Maintenance Manual. 3. It is recommended that apply the appropriate covering to the electric actuator in the environment of splashing the liquid other than water.

Size Order No. 15 Return plate Aluminum die-cast Painting 8 LE-D-2-1 16 Magnet 21 16 LE-D-2-2 17 Wear ring holder Stainless Size 25,150st only 25 LE-D-2-3 18 Wear ring Resin Size 25,150st only 19 Screw shaft pulley Aluminum alloy Maintenance parts/Grease 20 Motor pulley Aluminum alloy Apply for Grease pack 21 Belt order No. 22 Scraper NBR Piston rod and Guide GR-S-010(10) GR-S-020(20) 23

Size Order No. 11 Socket Carbon steel Electroless nickel plated 16 LE-D-2-2 12 Connect shaft Carbon steel Electroless nickel plated 21 25 LE-D-2-3 13 Rolling bearing 14 Return box Aluminum die-cast Painting Maintenance parts/Grease 15 Return plate Aluminum die-cast Painting Apply for Grease pack 16 Magnet order No. 17 Wear ring holder Stainless Size 25,150st only For Piston rod GR-S-010(10

ENC 16 7 MOT 6 (DC24V) (+) (+) (+) (+) (-) 8 PWR 5 9 10 11 FE 13 - 3.3. 1JXCD1714 - 2DIN JXCD1815 - 3.4. (1) 2 DIN [1]JXCD17[2]DINJXCD182M4 DIN DIN DIN DIN DIN A DIN (2) M4 M4 16 - (1)D (100 ) (2)2mm 2 D (3) 40 30mm 50mm ()60mm 0mm 16 *LEH 10mm 25 30mm 30mm 50mm DIN 60mm 17 - 4 4.1 Node Address/Data Rate 1 DeviceNet MSD LSD Data Rate *1 PGM DeviceNet *2 010

(See Fig. 10) Grease part number:GR-S-010(10g) Pin B Grease applied Bracket Piston rod of the built-in shock absorber Grease applied Fig.10 9 - Please do not remove the grease applied to the piston rod end of the built-in shock absorber and periodically check the condition of the grease. 10. Maintenance Service 10-1.