Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 3 [110 VAC, (115 VAC)], Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 4 [220 VAC, (230 VAC)], Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 3 [110 VAC, (115 VAC)], Electrical Entry: MO (M Plug Connector, w/o Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 3 [110 VAC, (115 VAC)], Electrical Entry: L (L Plug Connector, Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 3 [110 VAC, (115 VAC)], Electrical Entry: LO (L Plug Connector, w/o Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 4 [220 VAC, (230 VAC)], Electrical Entry: L (L Plug Connector, Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 4 [220 VAC, (230 VAC)], Electrical Entry: LN (L Plug Connector, w/o Lead Wire), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: M3 (Body Ported)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 4 [220 VAC, (230 VAC)], Electrical Entry: LO (L Plug Connector, w/o Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported)
Port w/Piping Thread Spec (M3)], CE Approval: -
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
: N (NPT), Bracket: F (Bracket), Made to Order: X500 [Pilot Exhaust Port w/Piping Thread Spec (M3)]
: N (NPT), Bracket: None, Made to Order: X500 [Pilot Exhaust Port w/Piping Thread Spec (M3)]
1/4), Thread: T (NPTF), Bracket: None, Made to Order: X500 [Pilot Exhaust Port w/Piping Thread Spec (M3)]
to Order: X500 [Pilot Exhaust Port w/Piping Thread Spec (M3)]
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 1 (100 VAC), Electrical Entry: LN (L Plug Connector, w/o Lead Wire), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: D (Push-turn Locking Slotted Type), Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 1 (100 VAC), Electrical Entry: LO (L Plug Connector, w/o Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 2 (200 VAC), Electrical Entry: LO (L Plug Connector, w/o Connector), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 2 (200 VAC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 2 (200 VAC), Electrical Entry: L (L Plug Connector, Lead Wire 300mm), Light/Surge Voltage Suppressor: Z (w/ Light/Surge Voltage Suppressor), Manual Override: D (Push-turn Locking Slotted Type), Port Size: M3 (Body Ported), Bracket: F (w/Bracket)
Actuation: 1 (2 Position Single Solenoid), Piping/EXH: 23 (Body Ported/Common Exhaust), Coil Specification: Standard, Voltage: 2 (200 VAC), Electrical Entry: M (M Plug Connector, w/Lead Wire 300mm), Light/Surge Voltage Suppressor: w/o Light/Surge Voltage Suppressor, Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported)