12 VDC 6 VDC 5 VDC 3 VDC With surge voltage suppressor With light/surge voltage suppressor M plug connector Nonlocking push type N.C.
1 V or less Analog output: 4 to 20 mA Max. load impedance: 300 (at 12 VDC) 600 (at 24 VDC) Min. load impedance: 50 PFMV304 PNP open collector output: 2 outputs Max. 80 mA, residual voltage 1 V or less Analog output: 4 to 20 mA Max. load impedance: 300 (at 12 VDC) 600 (at 24 VDC) Min. load impedance: 50 DC (+) DC (+) (Brown) Analog output (Brown) Analog output Load 12 to 24 VDC 12 to
Regeneration option C D Control circuit power supply (24 V) 24V side of the control circuit power supply (24 VDC) which supplies the controller. L11 L21 L11 Control circuit power supply (0 V) 0V side of the control circuit power supply (24 VDC) which supplies the controller.
Regeneration option C D Control circuit power supply (24 V) 24V side of the control circuit power supply (24 VDC) which supplies the controller. L11 L21 L11 Control circuit power supply (0 V) 0V side of the control circuit power supply (24 VDC) which supplies the controller.
Cable core wire colors Brown: 24 VDC (for solenoid valve) White: 0 V (for solenoid valve) Blue: 24 VDC (for control and input) Black: 0 V (for control and input) Gray: Not connected Terminal no.
Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.
Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF
6 12 VDC S type: Not available for AC.
P: With plug (M-5P) For non-plug-in only Rated voltage 5 6 24 VDC 12 VDC When mounting a pressure sensor etc., select Nil.
For manifold type 30, 31 VP Standard type (Cv: 0.008) SY1 3 5 L 1 M3 : Body ported VG VP Standard type (Cv: 0.008) 5 1 SY1 4 M : Base mounted S070 3 port VQ Port size Rated voltage For DC Nil: Without sub-plate M3: With sub-plate VKF 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC VQZ VZ Sub-plate style For manifold type S41 For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC VS (With gasket and screws)
12 VDC Voltage other than above (50 VDC or less) Nil Rc G NPTF Nil 3 1 station . . . 10 stations 1 . . .
ISA2 Note) 5 With LED light (24 VDC, Red) 50 20 to 50 l/min Note) 6 With LED light (24 VDC, Green) IS Note) LED light is available for 5, 6, 7, 8 (with terminal box for 24 VDC).
T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!
For manifold type 30, 31 VP Standard type (Cv: 0.008) SY1 3 5 L 1 M3 : Body ported VG VP Standard type (Cv: 0.008) 5 1 SY1 4 M : Base mounted S070 3 port VQ Port size Rated voltage For DC Nil: Without sub-plate M3: With sub-plate VKF 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC VQZ VZ Sub-plate style For manifold type S41 For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC VS (With gasket and screws)
: 5 r Pilot valve assembly VQZ111PCoil rated voltage Example) 24 VDC: 5 2-6-40
pressure switch (with indicator) (30 VDC) Refer to How to Order of respective models.
T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!
F .G. + 24 V Brown (2 pcs.) + 24 VDC + + + 24 V Power supply 24 VDC 0 V 0 V 0 V DC/DC Blue (2 pcs.) 0 V F .G.
12 VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.
Insulation resistance 500 VDC, 10 M min. between external terminals and F.E.